2014
DOI: 10.1016/j.ultramic.2014.05.005
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Specimen preparation for correlating transmission electron microscopy and atom probe tomography of mesoscale features

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Cited by 18 publications
(7 citation statements)
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“…When the final tip shape was approached (radius of curvature ~100 nm), the milling parameters were reduced to 5 keV 25 pA to reduce Ga + implantation and surface damage. Further details of the sample preparation method can be found in refs 50 and 51 .…”
Section: Methodsmentioning
confidence: 99%
“…When the final tip shape was approached (radius of curvature ~100 nm), the milling parameters were reduced to 5 keV 25 pA to reduce Ga + implantation and surface damage. Further details of the sample preparation method can be found in refs 50 and 51 .…”
Section: Methodsmentioning
confidence: 99%
“…[33,34] Samples for both atom-probe tomography (APT) and scanning transmission electron microscopy (STEM) characterization were prepared by the lift-out method, utilizing a dual-beam FIB microscope (Helios Nanolab, FEI Co., Hillsboro, OR, USA).…”
Section: Sample Preparation For Apt and Stemmentioning
confidence: 99%
“…With the development of the FIB, an abundance of new applications became accessible to APT [17,18]. A number of other publications describe techniques using the dual-beam FIB for the re-sharpening of blunt electropolished needles, for in situ lift-out from the bulk as well as for the construction of atom probe needles from thin sheets, ribbons or powder particles [13,[18][19][20][21][22][23][24][25][26][27][28].…”
Section: Introductionmentioning
confidence: 99%