2021
DOI: 10.1007/s10921-020-00741-x
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Speckle Interferometric Investigation of Argon Pressure-Induced Surface Roughness Modifications in RF-Sputtered MoO3 Film

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Cited by 4 publications
(10 citation statements)
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“…The presence of Argon gas modified the kinetic energy distribution of ablated particles and had a considerable effect on the film's quality. [ 31 ] The chamber base pressure was maintained at 10 −6 mbar, powdered sodium carbide was placed in the sputtering target, and the film deposition was conducted at a background argon pressure of 0.06 mbar. The target was powered by a magnetron (Advanced Energy, MDX 500) operating at 13.56 MHz and 200 W of RF power.…”
Section: Methodsmentioning
confidence: 99%
“…The presence of Argon gas modified the kinetic energy distribution of ablated particles and had a considerable effect on the film's quality. [ 31 ] The chamber base pressure was maintained at 10 −6 mbar, powdered sodium carbide was placed in the sputtering target, and the film deposition was conducted at a background argon pressure of 0.06 mbar. The target was powered by a magnetron (Advanced Energy, MDX 500) operating at 13.56 MHz and 200 W of RF power.…”
Section: Methodsmentioning
confidence: 99%
“…To delineate the potential of graph-based complex network features in untangling the thermal-induced intrafilm dynamics hidden in the specklegram, a thin film of molybdenum oxide (MoO 3 ) was prepared by RF magnetron sputtering technique. [7,30] The RF sputtering technique was selected because of its potential to produce low-cost, uniform, and good quality films with tailored stoichiometry. [31] The quality of the deposited films depend on various deposition parameters.…”
Section: Methodsmentioning
confidence: 99%
“…From the stylus profilometer, the film thickness was obtained as 150 nm. The thin film preparation by RF sputtering technique and the experimental setup for recording the specklegram were detailed in an earlier work of the author, [7] and the schematic of the experimental setup is , and (45-50 °C), respectively. Thus, 500 frames of the speckle image of pixel size 601 × 601 were extracted from the videograph of each temperature interval using MATLAB.…”
Section: Methodsmentioning
confidence: 99%
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“…Thin film technologies have revolutionized electronic and photonic industries enabling the development of micro-electronic and nano-electronic devices. Among thin films, metal-oxide thin films have emerged as an exciting class in terms of their widespread applications in sensors, detectors, solar panels, smart windows, fuel cells, transparent conducting electrodes, thermochromic and photochromics [1,2]. The physical, chemical and optical behaviour of thin film greatly depends on the surface morphology, composition, material, and preparation techniques.…”
Section: Introductionmentioning
confidence: 99%