Spectral and ion emission features of laser-produced Sn and SnO₂plasmas

Abstract

We have made a detailed comparison of the atomic and ionic debris, as well as the emission features of Sn and SnO 2 plasmas under identical experimental conditions. Planar slabs of pure metal Sn and ceramic SnO 2 are irradiated with 1.06 µm, 8 ns Nd:YAG laser pulses. Fast photography employing an intensified charge coupled device (ICCD), optical emission spectroscopy (OES), and optical time of flight emission spectroscopy are used as diagnostic tools. Our results show that the Sn plasma provides a higher extreme ultraviolet (EUV) conversion efficiency (CE) than the SnO 2 plasma. However, the kinetic energies of Sn ions are relatively low compared with those of SnO 2 . OES studies show that the Sn plasma parameters (electron temperature and density) are lower compared to those of the SnO 2 plasma. Furthermore, we also give the effects of the vacuum degree and the laser pulse energy on the plasma parameters.

Experimental Study on the Temporal Evolution Parameters of Laser–Produced Tin Plasma under Different Laser Pulse Energies for LPP–EUV Source

“…The research group observed that both the electron temperature and electron density of laserproduced tin plasma exhibited an initial rapid decrease followed by a gradual decrease as a function of increasing delay time. Lan et al from Huazhong University of Science and Technology used OES to investigate the effects of laser wavelength, laser pulse energy, and chamber pressure on the electron temperature and electron density of laser-produced Sn and SnO 2 plasmas in 2016 [16,17]. The research group found that the parameters of Nd:YAG-laser-produced plasma are higher due to the larger critical electron density of Nd:YAG-laser-produced plasma compared to CO 2 -laser-produced plasma.…”

Double-spherically bent crystal high-resolution X-ray spectroscopy of spatially extended sources

“…X-ray spectra of laser-produced plasmas (LPPs) have been intensively investigated [1][2][3][4][5] . The X-ray emission spectra from LPPs have been routinely measured using crystal spectrometers with both energy and spatial resolutions [6][7][8][9] .…”