Spectral and spatial resolution of an extreme ultraviolet broadband imaging spectrometer based on dispersion-matched zone plates

Abstract

We present a combined 1D imaging and broadband spectroscopy tool for analyzing laser-produced plasma sources of extreme ultraviolet light using a tapered zone plate that is dispersion-matched to a transmission grating. Specifically, we follow up on prior work [Mostafa et al. Opt. Lett. 48, 4316 (2023)] to obtain the actual spectral and spatial resolution of the imaging spectrometer and compare it to the design values. The imaging spectrometer is shown to have a spectral resolution of 1.2 nm at 13.5 nm, close to its design value, by assessing spectra obtained from carbon laser-produced plasma in a 5–180 nm wavelength band. The spatial resolution was obtained by placing slits near the object plane and back-illuminating the slit with a tin laser-produced plasma and found to be 17(5) µm, somewhat larger than the design specifications but still well within design limits for use for diagnosing plasma.