2017
DOI: 10.1063/1.4992106
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Spectral characteristics of (111) silicon with Raman selections under different states of stress

Abstract: (111) silicon is widely used in current microstructures. In this study, theoretical analysis shows that different states of elastic stress may result in different eigenvalues and their respective eigenvectors of the lattice dynamics secular equation. The key point in determining the spectral character is to obtain the Raman tensor corresponding to each eigenvector whose eigenvalue can be represented by a function of the stress tensor components. As examples, the wavenumber–stress factors under some specific st… Show more

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Cited by 13 publications
(11 citation statements)
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“…To analyze RS from Si(111), we consider coordinate system with the axes x 1 ‐(1 true1¯0), y 1 ‐(11 true2¯), z 1 ‐(111), in which Raman tensors (2) are given by Rx1αβ=()0131323,1emRy1αβ=()0131323,1emRz1αβ=()10013. …”
Section: Resultsmentioning
confidence: 99%
“…To analyze RS from Si(111), we consider coordinate system with the axes x 1 ‐(1 true1¯0), y 1 ‐(11 true2¯), z 1 ‐(111), in which Raman tensors (2) are given by Rx1αβ=()0131323,1emRy1αβ=()0131323,1emRz1αβ=()10013. …”
Section: Resultsmentioning
confidence: 99%
“…It should be noted that the ability to precisely measure the position of a band is much more a function of the wavelength precision of the instrument than of the spectral resolution. We are not trying to resolve two closely spaced bands, but rather to distinguish two samples with slight differences in the position of the same band like examples involving material stress measurements where bond angles change resulting in the Raman band associated with those bonds moving to a slightly different frequency . The limiting factor for this analysis is not going to be the resolution, but rather the precision (reproducibility).…”
Section: Results and Discussionmentioning
confidence: 99%
“…We are not trying to resolve two closely spaced bands, but rather to distinguish two samples with slight differences in the position of the same band like examples involving material stress measurements where bond angles change resulting in the Raman band associated with those bonds moving to a slightly different frequency. 57 The limiting factor for this analysis is not going to be the resolution, but rather the precision (reproducibility). For the Raman instrument we used in this work, the maximum RMS variation in peak position at any single point in the map between the five repeats is only 0.022 cm −1 .…”
Section: Acs Applied Bio Materialsmentioning
confidence: 99%
“…In the early 1970s, for example, the Raman frequency shift was used to investigate the effect of static uniaxial stress on silicon and to detect atmospheric pollutants (e.g., oil smoke and automobile exhaust gas) . The frequency shift is widely used for the measurement of stress in (111) silicon, for example, to investigate residual stress in porous silicon films due to a lattice mismatch between the film and substrates. , …”
mentioning
confidence: 99%
“…34 The frequency shift is widely used for the measurement of stress in (111) silicon, for example, to investigate residual stress in porous silicon films due to a lattice mismatch between the film and substrates. 35,36 In this Minireview, however, we focus specifically on the use of SERS frequency-shift assays for biomolecule and small molecule assaying, first discussing the various mechanisms that induce frequency shifts and second discussing assay fabrication and the incorporation of metallic nanostructures. Third, we highlight the advantages of SERS frequency-shift assays for multiplex protein detection and more recent assays for RNA/ DNA, ions, and small molecules.…”
mentioning
confidence: 99%