Abstract:Gold-based subwavelength photonic crystal (PhC) structures on GaAs substrate have been fabricated on a wafer scale. The structures have then been characterized and compared with related simulation results. Integrating these gold-based PhC structures onto III-V semiconductor infrared (IR) photodetectors through a top-down approach has promising potential to enhance detector's performance; especially as its wafer scale fabrication method enables the direct adaption to high volume IR detector processing line.
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