Spectroscopic analysis of lead lanthanum zirconate titanate films using UV-VIS and ellipsometry

Abstract

Spectroscopic ellipsometry and ultraviolet-visible (UV-VIS) spectrometry were utilized to study the optical properties of ferroelectric lead lanthanum zirconate titanate (PLZT) films. These films were deposited on platinized silicon [Si(100)/ SiO2/TiO2/Pt(111)] substrates using the chemical solution deposition method. Films were annealed at two different temperatures (650 and 750 °C) using rapid thermal annealing. Shimadzu UV-1800 UV-VIS spectrophotometer with a resolution of 1 nm was used to measure the reflectance data in the spectral range of 300–1000 nm with a step size of 1 nm. The bandgap values were determined from the reflectance spectra using appropriate equations. A J.A. Woollam RC2 small spot spectroscopic ellipsometer was used to obtain the change in amplitude (Ψ) and phase (Δ) of polarized light upon reflection from the film surface. The spectra were recorded in the wavelength range of 210–1500 nm at an incident angle of 65°. Refractive index (n) and extinction coefficient (k) were obtained by fitting the spectra (Ψ, Δ) with the appropriate models. No significant changes were observed in the optical constants of PLZT films annealed at 650 and 750 °C. The optical transparency and the strong absorption in the ultraviolet (UV) region of PLZT films make them an attractive material for optoelectronic and UV sensing applications.