2017
DOI: 10.1149/07535.0021ecst
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Spectroscopic and Electrochemical Analysis of Cu(I) Complex of Copper Sulfate Electroplating Solution and Evaluation of Plated Films

Abstract: In this study, we investigated a behavior of cuprous ion (denoted as Cu(I)) in the copper sulfate plating solution and effects of the Cu(I) on a quality of Cu plating film. Through spectroscopic method, two kinds of holding structure of Cu(I) in the plating solution were firstly indicated by analyzing the kinetics of complex forming reaction between the Cu (I) and bathocuproinedisulfonic acid, disodium salt (BCS). One component is ignited from Cu(I) probably incorporated into deep inside of polyethylene glycol… Show more

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Cited by 6 publications
(10 citation statements)
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“…5 C , F ). BCS chelated Cu(I) instead of Cu(II), and Ctr1 imported Cd [ 26 , 70 ]. The cellular Cu content increase when Cu co-exposure with BCS ( Fig.…”
Section: Discussionmentioning
confidence: 99%
“…5 C , F ). BCS chelated Cu(I) instead of Cu(II), and Ctr1 imported Cd [ 26 , 70 ]. The cellular Cu content increase when Cu co-exposure with BCS ( Fig.…”
Section: Discussionmentioning
confidence: 99%
“…The response to the electrolysis of the CVS and Cu(I) concentration ( : A0) shows good correlation, suggesting that the increase in Cu(I) concentration affects the roughness of the plated surface. 22) Although Cu(I) detection through a color reaction is a simple and easy method, it is not suitable for high-sensitivity detection in solution. Sensitivity due to absorption is limited to about 10 −6 mol=L and further decreases in the plating solution owing to limitations.…”
Section: Resultsmentioning
confidence: 99%
“…Electrolysis was carried out at a current density of 62.5 mA=cm 2 . 21,22) Absorbance was measured with JASCO V-630, and fluorescence measurement was performed with JASCO FR-8200 or Hamamatsu Photonics FLS920S at room temperature.…”
Section: Experimental Methodsmentioning
confidence: 99%
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“…The disodium salt of bathocuproinedisulfonic acid (BCS) can be used to quantify the monovalent copper concentration in aqueous solutions, [6][7][8] and we have succeeded in analyzing the Cu(I) contained in plating solutions by absorption measurements of a chelate complex of Cu(I) with BCS. [9][10][11][12] Although Cu(I) in electroplating solutions is considered to be undetectable because they are oxidized immediately, in fact, a large amount of Cu(I) is contained in production line plating solutions. However, the conclusion on the relationship between the accumulation of Cu(I) in the solution and the plating surface was insufficient.…”
mentioning
confidence: 99%