Spectroscopic and probe measurements of structures in a parallel-plates RF discharge with particles

Abstract

The characteristics of plasma parameters and their spatial structures in a parallel-plates RF discharge in argon modified by the injection of small carbon particles have been investigated. A larger peak-to-peak fluctuation of space potential in the bulk plasma region was observed by an emissive probe measurement together with a decrease in the self-bias voltage. The electron energy distribution function in the plasma bulk as measured by an energy analyser also showed the prwence of a higher energy tail. The enhancement of an argon atomic line emission in the midgap was consistent with the above results, showing the transition of the discharge mode from the gamma to alpha regimes. Spatial and temporal behaviours of paliicle density and size were measured by a newly proposed ellipsometric detection method of the laser Mie scattered light. Slow shift of the peak position of density and size distributions towards the sheath edge of the powered electrode was observed.

Photoabsorption Properties in InAs Wire Structures Investigated by Dual Light Illumination Method in Scanning Tunneling Microscopy

“…For example, Boeuf [14] developed a particle-in-cell/Monte Carlo approach, while McCaughey and Kushner [13] introduced a hybrid Monte Carlo/molecular dynamics approach. It is found that dust grains can increase the number of high-energy electrons in the tail of the EEDF, and this is in agreement with experimental observations [12]. Wang and Dong [15] solved the electron Boltzmann equation using the Lorentz approximation and a fixed electric field (see, e.g.…”

“…Several experiments [12] and numerical simulations [13,14] have been devoted to the EEDF in dusty plasmas. For example, Boeuf [14] developed a particle-in-cell/Monte Carlo approach, while McCaughey and Kushner [13] introduced a hybrid Monte Carlo/molecular dynamics approach.…”

Mie-Scattering Ellipsometry

“…The region was initially dome-shaped. However, it became concentrated at the center axis and moved toward the rf electrode at the same time [23]. The transition may be due to the time evolution of plasma potential interacting with and interacted by negatively charged particles.…”

“…The procedures of calculation of S p and S s from particle size and its optical index are given in [22,23].…”

Calibration of Polarization-Sensitive and Dual-Angle Laser Light Scattering Methods Using Standard Latex Particles

“…Among light scattering methods based on different principles, measuring the difference of the intensities of the horizontal and vertical components of scattered light (polarization method) is widely used (11)(12)(13)(14)(15)(16). This method has the disadvantages that the refractive index of the particles must be known and measurement of agglomerated or very high concentration particles is difficult because of lack of related theory and multiple light scattering, respectively.…”