Spectroscopic characterization of acid generation and concentration and free volume evolution in chemically amplified resists

Jessop, Julie L. P.; Goldie, Scott N.; Scranton, Alec B.; Blanchard, G. J.

doi:10.1116/1.1432969

Cited by 7 publications

(7 citation statements)

References 30 publications

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“…Depending on the solvent's pH, CV generally exists in three different forms. 47 In the present study, the CV was dissolved in a PBS buffer with a pH value of 7.2 and should therefore exist predominantly in the carbonium ion (native) form (chemical structure of which is shown in the inset of Figure 6a). This was confirmed by the occurrence of a prominent singlet π-π* electronic absorption peak at 593 nm in the UV-vis spectrum of the CV solutions (see Figure 6a).…”

Section: Resultsmentioning

confidence: 99%

Deposition Method for Preparing SERS-Active Gold Nanoparticle Substrates

et al. 2005

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Surface-enhanced Raman scattering or SERS, discovered some 20 years ago, has recently become a promising tool for routine biofluid assays in a clinical setting. Many attempts have been made to produce cheap and reproducible SERS-active substrates. In this study, we report on the fabrication of SERS-active substrates through the convective assembly of gold (Au) particles on electrostatically charged glass slides. We show that, by a proper control of the initial particle concentration in an evaporating Au suspension droplet, it is possible to obtain a closely packed colloidal film capable of generating SERS activity. Finally, AFM and SERS measurements of the resulting films reveal comparability in performance with previous silane-immobilized Au colloidal films. The minimum electromagnetic enhancement factor of our films is estimated to be about 2 x 10(4).

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Section: Resultsmentioning

confidence: 99%

Deposition Method for Preparing SERS-Active Gold Nanoparticle Substrates

et al. 2005

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“…The appearance of the band at 630 nm is attributed to the production of the protonated Crystal Violet. 20 Since the spectral evolution keeps an isosbestic point at 308 nm, the photochemical reaction did not lead to complex decomposition of the initial NI-Sf. No remarkable spectral evolution was observed by further irradiation after 1450 shots of the nanosecond 355 nm laser in Fig.…”

Section: Evolution Of the Steady-state Absorption Spectra Under Photo...mentioning

confidence: 99%

Picosecond—nanosecond laser photolysis studies of a photoacid generator in solutions: Transient absorption spectroscopy and transient grating measurements

Saotome

Takano

Tokushima

et al. 2005

Photochem Photobiol Sci

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Photochemical reaction profiles of a photoacid generator, N-trifluoromethylsulfonyloxy-1,8-naphthalimide (NI-Sf), in solution phase were investigated by means of picosecond and nanosecond transient absorption spectroscopy as well as transient grating measurements. Picosecond transient absorption spectroscopy directly revealed that the lifetime of the S1 state and the intersystem-crossing yield decreased with increasing solvent polarity. On the other hand, photochemical reaction yield increased with an increase in the solvent polarity. These results indicated that the photochemical reaction started in the S1 state. Transient grating measurement directly detected the diffusion process of the proton and its diffusion coefficient was obtained to be 3.9 x 10(-9) m2 s(-1), which was several times larger than those of the usual solute molecules.

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“…There are a number of patents regarding fiber probes for specific use in Raman scattering 233, 234. Other areas where fiber‐optics technology has been applied are light scattering,235, 236 IR spectroscopy,237–242 fluorescence spectroscopy,243 UV spectroscopy,244–247 pressure sensing,32, 33, 37, 38 in‐line monitoring of polymer processing,237, 239, 246, 248–251 cure monitoring,215, 243 and in pH sensors 252–256…”

Section: On‐line Sensors For Polymer Property Trajectory Monitoringmentioning

confidence: 99%

A Critical Overview of Sensors for Monitoring Polymerizations

Fonseca

Dubé

Penlidis

2009

Macro Reaction Engineering

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The available on‐line and in‐line sensor technologies developed for polymerization reactors from 1990 until today are discussed and critically reviewed. About 600 references are included, which evidence the growth in sensor technology in the last two decades. Sensors for operational parameters in polymer reactors (i.e. temperature, pressure, level and flow) as well as sensors for polymer property monitoring (i.e. calorimetry, chromatography and spectroscopy, among others) are included. Complementary topics such as state estimation, multivariate statistical methods, fault diagnosis techniques and optimal sensor selection and location are briefly covered.

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Spectroscopic characterization of acid generation and concentration and free volume evolution in chemically amplified resists

Abstract: Dependence of acid generation efficiency on the protection ratio of hydroxyl groups in chemically amplified electron beam, x-ray and EUV resists

Cited by 7 publications

References 30 publications

Deposition Method for Preparing SERS-Active Gold Nanoparticle Substrates

Deposition Method for Preparing SERS-Active Gold Nanoparticle Substrates

Picosecond—nanosecond laser photolysis studies of a photoacid generator in solutions: Transient absorption spectroscopy and transient grating measurements

A Critical Overview of Sensors for Monitoring Polymerizations

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