Spectroscopic Diagnostics of Atmospheric Argon Microwave Plasma Based on an Inductive Coupling Window-Rectangular Resonator

Abstract

We present a novel microwave plasma source based on an inductive coupling window-rectangular resonator. A definite volume of atmospheric argon microwave plasma is excited in the source under the input of several kilowatts of microwave power operating at 2.45 GHz. The excitation temperature and electron temperature of the argon plasma are separately researched by using Boltzmann plot and line-to continuum intensity ratio of Ar I spectral lines. Its electron density is inferred from the Stark broadening of the 𝐻 𝛽 line at 486.13 nm.

Precision Analysis and Control of the Mold Rapid Development Based on Reverse Engineering

“…The reverse research is an important part of modern industrial development, and the accuracy analysis is the key issue in the technology. Few studies [1][2][3][4][5][6][7] about accuracy evaluation of the product reverse design, less studies [8][9] about the mold reverse design, while least research on precision analysis combined with the whole process of reverse rapid mold development. In this paper, a quantitative method of precision analysis on reverse rapid mold development is proposed to improve the situation.…”

Comparative Study on Excitation Temperature, Electron Temperature and Electron Density in an Atmospheric Argon Microwave Plasma

“…A novel microwave plasma source based on the inductive coupling window-rectangular resonator has been reported. [1] The source can produce an infinitevolume of atmospheric argon microwave plasma under the input microwave power of 2.6 kW operating at 2.45 GHz. The excitation temperature 𝑇 exc , electron temperature 𝑇 𝑒 and electron density 𝑛 𝑒 of the atmospheric argon microwave plasma are comparatively studied by using emission spectroscopy in this work.…”

“…[3] The excitation temperature is also given by using the Ar I lines with high upper state excitation energy in the range from 420 nm to 570 nm in Ref. [1]. Figure 3 compares the excitation temperatures obtained by using the Ar I lines in the two wavelength ranges mentioned above.…”

“…1 are all set to be 1.5 and 1.15 in the calculation of 𝑇 𝑒 , respectively. [1,5,6] Figure 4 shows the excitation temperatures 𝑇 exc and electron temperatures 𝑇 𝑒 obtained with different wavelengths at different input microwave powers.…”

“…[10,11] in Table 1 on the input microwave power, and the figure also shows 𝑛 𝑒 determined by the 𝐻 𝛽 line at 486.13 nm. [1] The parameters (𝑊 0 , 𝜔 0 and 𝛼 0 ) at the electron temperature 𝑇 𝑒 being unequal to 5000 K and 10000 K are obtained by linear interpolation. This is acceptable due to the fact that the changes of 𝑊 0 , 𝜔 0 and 𝛼 0 are small in the 𝑇 𝑒 interval of 5000 K-10000 K. The figure shows that the electron density inferred from Ar I lines are nearly 1.3-2 times higher than that from the 𝐻 𝛽 line.…”