Zinc phthalocyanine (ZnPc) thin films are vacuum-evaporated on bare indium-tin-oxide (ITO) coated glass by varying substrate temperature and growth rate. The samples are characterized by atomic force microscopy, X-ray diffraction and infrared spectroscopy. The temperature does not play a clear role in the crystalline growth of ZnPc possibly due to the significant structural defects on ITO surface, while it strongly influences the surface morphology and molecular alignment. The relationships between growth characteristics and performances of photovoltaics with planar heterojunction are discussed in detail. Increasing temperature or growth rate leads to a rougher surface morphology, which enables more donor/accepter interface area for photocurrent generation. Moreover, at elevated temperature, more molecules adopt standing-up geometry, resulting in a reduction in overall efficiency. The results imply that low-temperature a) Electronic mail: zhou@se.kanazawa-u.ac.jp, b) Electronic mail: taima@se.kanazawa-u.ac.jp 2 process in order to control the molecular alignment is preferred for efficient organic photovoltaics. By simply increasing the growth rate of ZnPc up to 40 Å/s at room temperature,ZnPc/C60 planar heterojunction shows an efficiency of 1.66%, compared to 1.24% for the cell when ZnPc is prepared at 0.10 Å/s.