Runaway electrons play an important role in the avalanche formation in nanosecond-and subnanosecond-pulse discharges. In this paper, characteristics of a supershort avalanche electron beam (SAEB) generated at the subnanosecond and nanosecond breakdown in sulfur hexafluoride (SF 6) in an inhomogeneous electric field were studied. One pulser operated at negative polarity with voltage pulse amplitude of ∼130 kV and rise time of 0.3 ns. The other pulser operated at negative polarity with voltage pulse amplitude of 70 kV and rise time of ∼1.6 ns. SAEB parameters in SF 6 are compared with those obtained in krypton (Kr), nitrogen (N 2), air, and mixtures of SF 6 with krypton or nitrogen. Experimental results showed that SAEB currents appeared during the rise-time of the voltage pulse for both pulsers. Moreover, amplitudes of the SAEB current in SF 6 and Kr approximately ranged from several to tens of milliamps at atmospheric pressure, which were smaller than those in N 2 and air (ranging from hundreds of milliamps to several amperes). Furthermore, the concentration of SF 6 additive could significantly reduce the SAEB current in N 2-SF 6 mixture, but it slightly affected the SAEB current in Kr-SF 6 mixture because of the atomic/molecular ionization cross section of the gas had a much greater impact on the SAEB current rather than the electronegativity.