2020
DOI: 10.26434/chemrxiv.13019117.v1
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Speed-Dependent Adaptive Partitioning QM/MM for Displacement Damage Simulations

Abstract: Solids receive displacement damages (DD) when interacting with energetic particles, which may happen during the fabrication of semiconductor devices, in harsh environments and in certain analysis techniques. Simulations of the DD generation are usually carried out with classical molecular dynamics (MD), but classical MD does not account for all the effects in DD, as demonstrated by <i>ab initio</i> calculations of model systems in literature. A fully <i>ab initio</i> simulation of the D… Show more

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