Highly intense ArF and KrF laser radiation-induced photolysis of gaseous dichloroethenes allows chemical vapor deposition of ultrafine amorphous Cl-substituted hydrogenated carbon soot, which was characterized by FTIR, Raman, X-ray photoelectron and Auger spectroscopy, and electron microscopy, and diagnosed for magnetic and thermal properties. The deposited submicroscopic material was shown to contain C(sp3)−H, C−Cl, C−O, and CO bonds and upon heating to 700 °C to evolve H2, HCl, Cl2, and C/H fragments and transform to graphite-like carbon. The deposited soot is diamagnetic, has a large surface area, and has a potential for synthesis of soot modified at the C−Cl bonds by other substituents.