2007
DOI: 10.1143/jjap.46.l886
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Spin-on n-Type Silicon Films Using Phosphorous-doped Polysilanes

Abstract: We have developed a liquid precursor that can be used in a solution process to form n-type doped silicon films. This precursor is based on phosphorus-doped hydrogenated polysilane synthesized by photo-copolymerizing cyclopentasilane and white phosphorus. By spin-coating this precursor, we have prepared n-type amorphous silicon films and polycrystalline silicon films with resistivities of 6.5–27 Ω·cm and 2.0–10 mΩ·cm, respectively.

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Cited by 32 publications
(28 citation statements)
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“…Decreased photoluminescence intensities for PMPS, DMPS and DPPS were observed upon doping, attributed to structural transition from the addition of PBr 3 and annealing at 300˚C. This characteristic has been previously explained by light-induced charge separation between polysilane units and P [17].…”
Section: Electronic and Optical Properties Of Thin Filmsmentioning
confidence: 57%
“…Decreased photoluminescence intensities for PMPS, DMPS and DPPS were observed upon doping, attributed to structural transition from the addition of PBr 3 and annealing at 300˚C. This characteristic has been previously explained by light-induced charge separation between polysilane units and P [17].…”
Section: Electronic and Optical Properties Of Thin Filmsmentioning
confidence: 57%
“…Amorphous silicon doped with boron or phosphorus would function as p-type or n-type semiconductor, respectively [10]. Energy levels would be different between PDPS with B and PDPS with P, and previously reported values were used for the energy levels [11,12].…”
Section: Resultsmentioning
confidence: 99%
“…In addition, there would be energy barrier at the semiconductor/metal interfaces as indicated by band bending in Figure 7, and heavy doping of B or P would reduce the contact resistance. The present PDPS-based solar cells were compared with other silicon-based solar cells [10,13,14] such as amorphous silicon solar cells prepared by inductively coupled plasma chemical vapor deposition (ICP-CVD) and spin coating method, as listed in Table 2. The present solar cells fabricated by spin-coating have simple fabrication process and better cost performance.…”
Section: Resultsmentioning
confidence: 99%
“…13 All manipulations were performed in a nitrogen-atmosphere glove box in which a tshimoda@jaist.ac.jp the water and oxygen concentrations were below 1 ppm. The white phosphorus (P 4 ) was added as a dopant to a glass vessel containing Si 5 H 10 at concentrations ranging from 0.01 to 3 wt%.…”
mentioning
confidence: 99%
“…Flat Si films for testing the success of P doping in the liquid-Si ink were prepared using the following procedures that were reported in the literature. 13 The liquid-Si ink was spin-coated on a 20-mm-square quartz substrate at 2 krpm for 30 s and was then annealed for 5 min on a hot plate at 400 • C. Next the film was annealed for 20 min in a rapid thermal annealing (RTA) furnace over a range from 400 to 800 • C under N 2 atmosphere. The concentrations of P in these flat Si film samples were measured with secondary-ion-mass spectroscopy (SIMS) using a cesium primary beam.…”
mentioning
confidence: 99%