SPIRIT - A Bipolar/BiCMOS Isolation Technology For High-Performance VLSI

Burghartz,; Cifuentes,; Warnock,; McIntosh,; Stanis,; Cressler,; Sun, Dong; Comfort,; Jenskins,

doi:10.1109/vlsit.1993.760289

Symposium 1993 on VLSI Technology 1993

DOI: 10.1109/vlsit.1993.760289

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SPIRIT - A Bipolar/BiCMOS Isolation Technology For High-Performance VLSI

Burghartz Burghartz¹,

Cifuentes Cifuentes

Warnock Warnock

et al.

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SPIRIT - A Bipolar/BiCMOS Isolation Technology For High-Performance VLSI

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