Spoke behaviour in reactive HiPIMS

Klein, Peter; Hnilica, Jaroslav; Fekete, Matej; Šlapanská, Marta; Vašina, Petr

doi:10.1088/1361-6595/abfbc5

Cited by 5 publications

(11 citation statements)

References 36 publications

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“…An increase of the spoke propagation velocity with nitrogen admixture was also observed in a similar setup during R-HiPIMS on the niobium target [27] in case of the total pressure of 0.4 Pa, where the velocity increased from 6.0 ± 0.5 km s −1 in a pure argon plasma to 11.5 ± 3.0 km s −1 in a pure nitrogen plasma. The larger uncertainty of the propagation velocities in a higher N 2 flow is analogous to the broader distributions presented here.…”

Section: Shape Propagation Velocity and Length Of The Spokesupporting

confidence: 69%

“…In work dealing with spokes on Ti target in Ar-N 2 R-HiPIMS, the diffusive spokes have been detected regardless of the reactive gas content in the plasma [24]. On the contrary, the transition from triangular to stochastic spoke shape on Nb target with the addition of nitrogen has been reported in our previous work [27]. The total pressure was lower, but the identical experimental chamber and magnetron assembly, as in this study, were used.…”

Section: Shape Propagation Velocity and Length Of The Spokesupporting

confidence: 56%

“…The spoke's behaviour has been studied in Ar-N 2 R-HiPIMS of metallic Nb target and nitrided NbN target for several admixtures of reactive gas [27]. The spokes on the niobium target and nitrided target had identical properties in terms of the propagation velocity, spoke shape and mode number in different N 2 admixtures.…”

Section: Introductionmentioning

confidence: 99%

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Spatially resolved study of spokes in reactive HiPIMS discharge

Šlapanská¹,

Kroker²,

Klein³

et al. 2022

Plasma Sources Sci. Technol.

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Understanding mechanisms behind the formation and propagation of ionisation zones, so-called spokes, have been highly important since the first observations in HiPIMS discharges. To this day, however, a complete description is still lacking. This contribution gives an insight into the spokes in reactive Ar-N2 atmosphere using titanium target. The aim of this study is to describe not only global parameters of spokes such as their shape, length and propagation velocity but also provide a description of parameters evolving over the spoke, such as floating potential and spectral emission. The measurements of the latter clearly showed which species emission is most prominent and how it changes with transition from non-reactive argon discharge towards the discharge driven in a pure nitrogen atmosphere. Implications on the gas dynamics and discharge transitions are discussed.

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Section: Shape Propagation Velocity and Length Of The Spokesupporting

confidence: 69%

Section: Shape Propagation Velocity and Length Of The Spokesupporting

confidence: 56%

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Spatially resolved study of spokes in reactive HiPIMS discharge

Šlapanská¹,

Kroker²,

Klein³

et al. 2022

Plasma Sources Sci. Technol.

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“…Spoke appearance and properties are dependent on almost every experimental condition [14,17,[22][23][24][25]41], and even a small variation may induce changes [26,30,52]. Thus, a sufficient amount of the evaluated data is required to create reliable statistics, i.e.…”

Section: Statistical Analysis Of the Relative Spoke Sizementioning

confidence: 99%

Single-shot spatial-resolved optical emission spectroscopy of argon and titanium species within the spoke

Šlapanská¹,

Kroker²,

Hnilica³

et al. 2021

J. Phys. D: Appl. Phys.

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The rotating plasma patterns, also known as ionisation zones or spokes, observed, among other discharges, in high power impulse magnetron sputtering discharge (HiPIMS) require non-invasive diagnostics favourable for a precise characterisation of their properties. In this contribution, the single-shot spatial-resolved optical emission spectroscopy of the spoke was conducted in non-reactive HiPIMS discharge using a titanium target. Investigated working pressures cover the conditions with the presence of localised, well-defined spokes. A fast photodiode and a cylindrical Langmuir probe were utilised to capture and determine the passing spoke position. These signals were synchronised with the acquisition of the optical emission spectrum by the intensified charge-coupled device detector. A large amount of single-shot data enabled the statistical analysis of the spoke. The optical emissions of argon atoms and ions and titanium atoms and ions were investigated in the passing spoke. It was found that the intensities of the spectral lines of the Ar and Ti species have the characteristic evolution for all studied spectral lines of this specific species within the spoke. The intensity evolutions are independent of the applied pressure. The evolution of the excitation temperatures determined by the Boltzmann plot method using the Ar II and Ti I and Ti II spectral lines remains constant within the spoke in the margin of standard error for all investigated pressures.

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“…Ions are also affected by collisions [12][13][14], mostly ion-ion Coulomb collisions in the case of high ion density [15,16]. Finally, the ion transport is also affected by the presence of spokes, long-wavelength oscillations observed in magnetron sputtering plasmas [17][18][19][20][21][22]. Spokes have been shown to modulate the electric field strength and direction [23][24][25][26][27] which can affect the trajectory of ions [12,[28][29][30].…”

Section: Introductionmentioning

confidence: 99%

Azimuthal ion movement in HiPIMS plasmas—Part II: lateral growth fluxes

Schüttler,

Thiemann-Monje,

Held

et al. 2023

Plasma Sources Sci. Technol.

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The transport of sputtered species from the target of a magnetron plasma to a collecting surface at the circumference of the plasma is analyzed using a particle tracer technique. A small chromium insert at the racetrack position inside a titanium target is used as the source of tracer particles, which are redeposited on the collecting surface. The azimuthal velocity of the ions along the racetrack above the target is determined from the Doppler shift of the optical emission lines of titanium and chromium. The trajectories are reconstructed from an analysis of the transport physics leading to the measured deposition profiles. It is shown that a simple direct line-of-sight re-deposition model can explain the data for low-power plasmas (direct current magnetron sputtering) and for pulsed high-power impulse magnetron plasmas (HiPIMS) by using the Thompson velocity distribution from the sputtering process as starting condition. In the case of a HiPIMS plasma, the drag force exerted on the ions and neutrals by the electron Hall current has to be included causing an azimuthal displacement in E ⃗ × B ⃗ direction. Nevertheless, the Thompson sputter distribution remains preserved for 50% of the re-deposited growth flux. The implications for the understanding of transport processes in magnetron plasmas are discussed.

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Spoke behaviour in reactive HiPIMS

Cited by 5 publications

References 36 publications

Spatially resolved study of spokes in reactive HiPIMS discharge

Spatially resolved study of spokes in reactive HiPIMS discharge

Single-shot spatial-resolved optical emission spectroscopy of argon and titanium species within the spoke

Azimuthal ion movement in HiPIMS plasmas—Part II: lateral growth fluxes

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