2015
DOI: 10.1017/s0263034615000786
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Spontaneous and artificial direct nanostructuring of solid surface by extreme ultraviolet laser with nanosecond pulses

Abstract: Nanostructuring can be either spontaneously appearing (such as laser-induced periodic surface structures, and diffraction patterns – for example, in windows of grid proximity-standing at the ablated target-surface) or artificially created (like – as we hoped – interference patterns) that can be in some extend controlled. Due to that a new interferometer (belonging to wave-front division category) with two aspheric mirrors has been developed. Each of these mirrors reflects approximately one half of incoming las… Show more

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Cited by 4 publications
(4 citation statements)
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“…This is very likely caused by a lack of back reflectivity of XUV/SXR radiation from smooth sample surfaces illuminated under normal incidence conditions. An absence of the spontaneously created ripples on FEL illuminated surfaces could be useful for imprinting a de-magnified pattern from a mask [33] and/or an interferometer [34].…”
Section: Experimental Resulsmentioning
confidence: 99%
“…This is very likely caused by a lack of back reflectivity of XUV/SXR radiation from smooth sample surfaces illuminated under normal incidence conditions. An absence of the spontaneously created ripples on FEL illuminated surfaces could be useful for imprinting a de-magnified pattern from a mask [33] and/or an interferometer [34].…”
Section: Experimental Resulsmentioning
confidence: 99%
“…The experiment was performed using the CAPEX device in Prague, which is a source of intense XUV radiation (with a wavelength of 46.9 nm) with an output pulse energy of 200 µJ. A more detailed description of CAPEX apparatus can be found in papers published earlier [7,20,21]. The XUV laser beam was focused inside a vacuum interaction chamber by a Si/Sc multilayer spherical mirror (R = 2100 mm) with reflectivity 15%.…”
Section: Methodsmentioning
confidence: 99%
“…The Ne-like Ar capillary-discharge laser (CDL) represents a compact, handy device that emits intense monochromatic radiation with a wavelength of 46.9 nm delivered in nanosecond pulses [1]. The extreme ultraviolet laser promises great potential for use in the field of holographic imaging [2], microscopy [3] and materials processing [4][5][6][7][8][9][10] including nanostructure manufacturing, benefitting from the short wavelength of its radiation. For numerous applications it is important that even a single photon carries the energy that exceeds the band gaps and the cohesive energies of almost all common materials.…”
Section: Introductionmentioning
confidence: 99%
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