Sprayed SnO2 thin films for NO2 sensors

Leo, G.; Rella, R.; Siciliano, P.; Capone, S.; Alonso, J. C.; Pankov, V.; Ortíz, A.

doi:10.1016/s0925-4005(99)00098-2

Cited by 43 publications

(21 citation statements)

References 11 publications

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“…The gas concentration was fixed at 3 ppm since it is the concentration listed in the safety standard by American Conference of Governmental Industrial Hygienist (ACGIH). It is observed that the sensor resistance rises in presence of NO for all temperatures and a well-defined maximum on sensor response is achieved at about 200 C. A somewhat similar result was reported by Leo et al for sprayed SNO film-based sensors [19]. The observed behavior may be understood by considering that the kinetic of the surface interaction is thermally ac- tivated and determined by the concurrence of several processes of adsorption, reaction, and desorption of previously adsorbed molecules of NO .…”

Section: Resultssupporting

confidence: 86%

Gas-sensing properties of sprayed films of (CdO)/sub x/(ZnO)/sub 1-x/ mixed oxide

Ferro

Rodríguez²,

Jiménez³

et al. 2005

IEEE Sensors J.

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Abstract-A novel NO 2 sensor based on (CdO) (ZnO) 1 mixed-oxide thin films deposited by the spray pyrolysis technique is developed. The sensor response to 3-ppm NO 2 is studied in the range 50 C-350 C for three different film compositions. The device is also tested for other harmful gases, such as CO (300 ppm) and CH 4 (3000 ppm). The sensor response to these reducing gases is different at different temperatures varying from the response typical for the p-type semiconductor to that typical for the n-type semiconductor. Satisfactory response to NO 2 and dynamic behavior at 230 C, as well as low resistivity, are observed for the mixed-oxide film with 30% Cd. The response to interfering gas is poor at working temperature (230 C). On the basis of this study, a possible sensing mechanism is proposed.

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Section: Resultssupporting

confidence: 86%

Gas-sensing properties of sprayed films of (CdO)/sub x/(ZnO)/sub 1-x/ mixed oxide

Ferro

Rodríguez²,

Jiménez³

et al. 2005

IEEE Sensors J.

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“…[20,21] The response to 100 ppb of NO 2 is so high that the estimated detection limit should be lower than 10 ppb.…”

Section: Processing and Testing Of Gas-sensing Devicesmentioning

confidence: 99%

Nanocrystalline Metal Oxides from the Injection of Metal Oxide Sols in Coordinating Solutions: Synthesis, Characterization, Thermal Stabilization, Device Processing, and Gas‐Sensing Properties

Epifani

Dı́az

Arbiol

et al. 2006

Adv Funct Materials

100

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International audienceMetal oxide (SnO₂, TiO₂, In₂O₃, ZnO) sols are prepared by various sol-gel processes in such a way as to hinder the condensation reactions. The obtained sols are injected at 160 °C into a solution of tetradecene and dodecylamine, and kept under heating for different periods of time. Depending on the starting sol, variously crystallized oxide nanoparticles are obtained, whose phase compositions and chemical structure have been studied by X-ray diffraction (XRD) and Fourier transform IR spectroscopy. The elimination of the organic residuals has been carried out by thermal treatment, and the thermal evolution of the nanoparticles has been studied by thermal analyses and Raman spectroscopy. High-resolution transmission electron microscopy studies coupled with XRD measurements show that the thermal treatment does not markedly affect the particle size, which remains in the nanometer-sized regime (from 3.5 to 8.5 nm, depending on the system), except in the case of ZnO. The thermally purified and stabilized powders, drop-coated onto alumina substrates with pre-deposited electrical contacts, have been tested as gas-sensing devices, displaying outstanding sensing properties even at room temperature

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“…Gas sensors made of oxide semiconductors have been widely used as domestic and industrial gas sensors because of their high sensitivity, quick response, and low cost [3]. However, most of these gas sensors are operable at a high temperature of a sensing element of above 200°C, which results in high power consumption and complexity in the integration [4][5][6][7][8][9]. Therefore, most researchers have focused their attention on the sensing material to improve the sensing properties [10][11][12], and some researchers have focused on the effect of electrode material and geometry on the sensing properties [13][14][15].…”

Section: Introductionmentioning

confidence: 99%

Sensing performance of SnO2 film fabricated by sputtering deposition

2015

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The effects of in situ-deposition temperature and post-deposition annealing on the microstructure of the sputtered SnO 2 thin film are studied. These effects on the performance of the resulting gas-sensing devices have been characterized. For in situ-deposition temperature, the film was deposited on a heated substrate, while for post-deposition annealing, the film was deposited on an unheated substrate and then annealed it at various temperatures. Microstructure changes in SnO 2 film were induced at various temperatures. Both films of in situ heating and post-annealing evoked only partial crystallization, especially at low temperatures, and the crystallinity was enhanced with high temperatures. SEM images confirmed that the grains and pores of the film changed with the thermal treatment. In consequence of the post-annealing, the pores grew wider; however, they grew narrow in the case of in situ heating. The film annealed at low temperature yielded high-response device to NO 2 gas compared with that annealed at higher temperature. The sensing devices fabricated by in situ deposition showed highest response.

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Sprayed SnO2 thin films for NO2 sensors

Cited by 43 publications

References 11 publications

Gas-sensing properties of sprayed films of (CdO)/sub x/(ZnO)/sub 1-x/ mixed oxide

Gas-sensing properties of sprayed films of (CdO)/sub x/(ZnO)/sub 1-x/ mixed oxide

Nanocrystalline Metal Oxides from the Injection of Metal Oxide Sols in Coordinating Solutions: Synthesis, Characterization, Thermal Stabilization, Device Processing, and Gas‐Sensing Properties

Sensing performance of SnO2 film fabricated by sputtering deposition

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