2019
DOI: 10.3390/ma12172687
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Sputtered LiCoO2 Cathode Materials for All-Solid-State Thin-Film Lithium Microbatteries

Abstract: This review article presents the literature survey on radio frequency (RF)-magnetron sputtered LiCoO2 thin films used as cathode materials in all-solid-state rechargeable lithium microbatteries. As the process parameters lead to a variety of texture and preferential orientation, the influence of the sputtering conditions on the deposition of LiCoO2 thin films are considered. The electrochemical performance is examined as a function of composition of the sputter Ar/O2 gas mixture, gas flow rate, pressure, natur… Show more

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Cited by 48 publications
(44 citation statements)
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“…In the former, this high rate performance is attained by the previously described reduction in interfacial resistance by the addition of a dielectric to the electrode| electrolyte interface. The capacities of these batteries are limited by the thickness and specific capacity of the cathode materials (Julien et al, 2019), so it remains to be seen if thin film LiPON-based ASSBs can make use of the next generation cathodes being developed in parallel. Over the course of the next decade, improvements to the specific capacities of these thin-film ASSBs enabled by next-generation technology will play a pivotal role in enabling the forthcoming "internet of things.…”
Section: Stability Of Liponmentioning
confidence: 99%
“…In the former, this high rate performance is attained by the previously described reduction in interfacial resistance by the addition of a dielectric to the electrode| electrolyte interface. The capacities of these batteries are limited by the thickness and specific capacity of the cathode materials (Julien et al, 2019), so it remains to be seen if thin film LiPON-based ASSBs can make use of the next generation cathodes being developed in parallel. Over the course of the next decade, improvements to the specific capacities of these thin-film ASSBs enabled by next-generation technology will play a pivotal role in enabling the forthcoming "internet of things.…”
Section: Stability Of Liponmentioning
confidence: 99%
“…[1] It is good to compare the opportunities in terms of battery format between conventional lithium-ion batteries and micro- Figure 1. a) Schematic cross section of an all solid-state thin film battery [3] and b) schematic cross section of conventional battery. [4] batteries.…”
Section: Solid-state Thin Film Microbatteriesmentioning
confidence: 99%
“…Mainly physical or chemical vapour deposition techniques such as; spray pyrolysis, atomic layer deposition, radio-frequency (RF) magnetron sputtering and pulsed laser deposition (PLD). [3] These techniques all begin with a condensed material that is transformed into the vapor phase in a gaseous environment under vacuum. The vapor is then transferred to a substrate which can be heated where it recondenses into a thin film.…”
Section: Thin Film Fabricationmentioning
confidence: 99%
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