2021
DOI: 10.1016/j.matt.2021.09.021
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Sputtered transparent electrodes for optoelectronic devices: Induced damage and mitigation strategies

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Cited by 76 publications
(68 citation statements)
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“…A wider choice of working pressures for PLD, as compared to sputtering, enables more efficient thermalization of energetic particles 12 which is advantageous for damage mitigation. A more elaborated discussion of the origins and strategies to alleviate the plasma-induced effects was recently reviewed by Aydin et al 6 In this work Sn-doped In 2 O 3 (ITO) films grown using waferscale PLD at different deposition pressures but with the same sheet resistance (R sh ) are implemented as both the front electrode and rear electrode in SHJ solar cells. To compare the effects of deposition pressure on other sensitive contact layers, buffer-free semi-transparent perovskite cells (ST-PSC) were fabricated with the same rear PLD ITO electrodes.…”
Section: Introductionmentioning
confidence: 99%
“…A wider choice of working pressures for PLD, as compared to sputtering, enables more efficient thermalization of energetic particles 12 which is advantageous for damage mitigation. A more elaborated discussion of the origins and strategies to alleviate the plasma-induced effects was recently reviewed by Aydin et al 6 In this work Sn-doped In 2 O 3 (ITO) films grown using waferscale PLD at different deposition pressures but with the same sheet resistance (R sh ) are implemented as both the front electrode and rear electrode in SHJ solar cells. To compare the effects of deposition pressure on other sensitive contact layers, buffer-free semi-transparent perovskite cells (ST-PSC) were fabricated with the same rear PLD ITO electrodes.…”
Section: Introductionmentioning
confidence: 99%
“…The magnified STEM images and energy-dispersive x-ray (EDX) spectroscopy mapping clearly outline the perovskite/MgF x /C 60 /SnO 2 /IZO top contact structure, identifying the presence of a ~15-nm C 60 layer and a ~20-nm SnO 2 layer. The latter acts as a buffer against damage from sputtering of the indium zinc oxide (IZO) transparent top electrode ( 28 ). We note that after perovskite deposition, all subsequently deposited films were obtained by vapor deposition techniques that yield highly accurate and reproducible layer thicknesses.…”
mentioning
confidence: 99%
“…The uniform coverage over the pyramids, either on the facets or in the valleys, is notable for solution-processable contacts made of 2D flakes, which is rarely achieved with solution-based techniques. 48 …”
Section: Resultsmentioning
confidence: 99%