Sputtered ZnO film on aluminium foils for flexible ultrasonic transducers

Zhou, Xiaosong; Zhao, Chao; Hou, Ruozhou; Jia, Zhang; Kirk, K.J.; Hutson, David; Guo, Yuanjun; Hu, Ping; Peng, Shuming; Zu, Xiaotao; Fu, Yong Qing

doi:10.1016/j.ultras.2014.05.006

Cited by 30 publications

(19 citation statements)

References 49 publications

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“…A variety of flexible ultrasound transducers have been reported recently. Mastronardi et al proposed a flexible ultrasound transducer made of AlN [ 7 ], and Zhou et al mentioned that they took advantage of the properties of ZnO nanowires to make a flexible ultrasound transducer [ 8 ]. However, these materials do not have as good performance as lead zirconate titanate (PZT, Pb(Zr 1−x Ti x )O 3 ).…”

Section: Introductionmentioning

confidence: 99%

A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT

Wang

Xue

Chen

et al. 2015

Sensors

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This paper proposes a novel flexible piezoelectric micro-machined ultrasound transducer, which is based on PZT and a polyimide substrate. The transducer is made on the polyimide substrate and packaged with medical polydimethylsiloxane. Instead of etching the PZT ceramic, this paper proposes a method of putting diced PZT blocks into holes on the polyimide which are pre-etched. The device works in d31 mode and the electromechanical coupling factor is 22.25%. Its flexibility, good conformal contacting with skin surfaces and proper resonant frequency make the device suitable for heart imaging. The flexible packaging ultrasound transducer also has a good waterproof performance after hundreds of ultrasonic electric tests in water. It is a promising ultrasound transducer and will be an effective supplementary ultrasound imaging method in the practical applications.

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Section: Introductionmentioning

confidence: 99%

A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT

Wang

Xue

Chen

et al. 2015

Sensors

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“…Although the acoustophoretic force shows the ability to reduce the clogging here, low acoustic power is usually produced by the current IDTs on rigid substrate for the lesser effect on the highly viscous fluid. However, the use of flexible substrate or thin film with IDTs patterned on can be attached to the nozzle surface and activated at the input power up to 35 W [ 59 , 60 , 61 ]. The other option is the use of BAW from the curved transducer attached to the nozzle.…”

Section: Discussionmentioning

confidence: 99%

Particle Accumulation in a Microchannel and Its Reduction by a Standing Surface Acoustic Wave (SSAW)

Sriphutkiat

Zhou

2017

Sensors

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Accumulation of particles in a high concentration on a microchannel wall is a common phenomenon in a colloidal fluid. Gradual accumulation/deposition of particles can eventually obstruct the fluid flow and lead to clogging, which seriously affects the accuracy and reliability of nozzle-based printing and causes damage to the nozzle. Particle accumulation in a 100 μm microchannel was investigated by light microscopy, and its area growth in an exponential format was used to quantify this phenomenon. The effects of the constriction angle and alginate concentration on particle accumulation were also studied. In order to reduce the clogging problem, an acoustic method was proposed and evaluated here. Numerical simulation was first conducted to predict the acoustic radiation force on the particles in the fluid with different viscosities. Interdigital transducers (IDTs) were fabricated on the LiNbO3 wafer to produce standing surface acoustic waves (SSAW) in the microchannel. It was found that the actuation of SSAW can reduce the accumulation area in the microchannel by 2 to 3.7-fold. In summary, the particle accumulation becomes significant with the increase of the constriction angle and fluid viscosity. The SSAW can effectively reduce the particle accumulation and postpone clogging.

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“…flexible/deformable acoustic wave sensors and microfluidic devices can be realized at a low cost [38].…”

Section: Accepted Manuscriptmentioning

confidence: 99%

Thin film flexible/bendable acoustic wave devices: Evolution, hybridization and decoupling of multiple acoustic wave modes

Tao

Wang²,

Luo

et al. 2019

Surface and Coatings Technology

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Sputtered ZnO film on aluminium foils for flexible ultrasonic transducers

Cited by 30 publications

References 49 publications

A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT

A Flexible Ultrasound Transducer Array with Micro-Machined Bulk PZT

Particle Accumulation in a Microchannel and Its Reduction by a Standing Surface Acoustic Wave (SSAW)

Thin film flexible/bendable acoustic wave devices: Evolution, hybridization and decoupling of multiple acoustic wave modes

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