1991
DOI: 10.1007/978-3-642-73513-4_12
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Sputtering

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Cited by 2 publications
(1 citation statement)
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“…Here, only two-particle interactions are taken into account. A successful application of this code is the description of physical sputtering of surfaces including dynamical changes of the composition [11,12,13]. However, due to its simplification it fails as soon as chemical processes get important [1].…”
Section: Modelsmentioning
confidence: 99%
“…Here, only two-particle interactions are taken into account. A successful application of this code is the description of physical sputtering of surfaces including dynamical changes of the composition [11,12,13]. However, due to its simplification it fails as soon as chemical processes get important [1].…”
Section: Modelsmentioning
confidence: 99%