2014 20th International Conference on Ion Implantation Technology (IIT) 2014
DOI: 10.1109/iit.2014.6939980
|View full text |Cite
|
Sign up to set email alerts
|

Sputtering and chemical modification of solid surfaces using oxygen ion beams

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
1
0

Year Published

2014
2014
2014
2014

Publication Types

Select...
1

Relationship

1
0

Authors

Journals

citations
Cited by 1 publication
(1 citation statement)
references
References 18 publications
0
1
0
Order By: Relevance
“…Cluster ion beams have several advantages for material surface modification [10][11][12][13]. For example, high-density irradiation enhances the surface temperature of the impact region, which enhances the chemical reactions occurring on the surface.…”
Section: Introductionmentioning
confidence: 99%
“…Cluster ion beams have several advantages for material surface modification [10][11][12][13]. For example, high-density irradiation enhances the surface temperature of the impact region, which enhances the chemical reactions occurring on the surface.…”
Section: Introductionmentioning
confidence: 99%