Sputtering of Tantalum by Atomic and Molecular Gold Ions: Comparative Study of Yields and Kinetic Energy Distributions of Atomic and Cluster Ions

Belykh, S. F.; Расулев, У. Х.; Samartsev, A.V.; Verkhoturov, Stanislav V.; Veryovkin, I. V.

doi:10.1007/978-3-7091-7506-4_50

Cited by 9 publications

(21 citation statements)

References 19 publications

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“…As a traditional approximation, we used tabulated literature data for the sublimation energies to estimate the values of the binding surface energy d. To clarify the role of the parameter d, we performed calculations of the probability (4) when the d variable is decreasing at ®xed value of the D parameter: D Ta d Ta 8X675 eV. For the bombardment by polyatomic primary ions, we have observed the best agreement between the present model and experiment [13,14] when d-parameter was reduced as follows: for primary Au À 2 ions ± d 0X73d Ta 6X33 eV and for primary Au À 3 ions ± d 0X56d Ta 4X86 eV. We made the same calculations for sputtering of Nb.…”

Section: Resultsmentioning

confidence: 79%

“…Fig. 5 shows the comparison between our experimental results on Ta x clusters sputtered by (6 keVaatom) atomic and polyatomic Au À m ions m 1Y 2Y 3 [13,14] and the corresponding calculation results obtained by the present model. Additionally, results on cluster Ta x neutrals sputtered by Ar ions [5] are shown in Fig.…”

Section: Resultsmentioning

confidence: 93%

“…We made the same calculations for sputtering of Nb. The corresponding theoretical calculations and experimental data [15] are shown in Fig 6. Additionally, results on cluster Nb x neutrals sputtered by Ar ions [5] are also shown in Fig. 6.…”

Section: Resultsmentioning

confidence: 99%

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Model for large cluster emission in ion sputtering of metals applied to atomic and polyatomic ion bombardments

Belykh

Matveev

Veryovkin

et al. 1999

Nuclear Instruments and Methods in Physics Research Section B:

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We propose a model for the emission of large clusters (x P 5) under ion bombardment of metals. In the frame of this model, the relative cluster yields have been calculated as a function of the number of atoms in the cluster for the sputtering of Al, Ag, Ta and Nb targets by atomic and polyatomic ions with energies of several keV/atom. The calculated data have shown a very good agreement with experimental results obtained by us and other researchers. On the basis of this agreement we have concluded that larger clusters are emitted as whole agglomerates during the early stages of the collision cascade evolution. Ó

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Section: Resultsmentioning

confidence: 79%

Section: Resultsmentioning

confidence: 93%

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Model for large cluster emission in ion sputtering of metals applied to atomic and polyatomic ion bombardments

Belykh

Matveev

Veryovkin

et al. 1999

Nuclear Instruments and Methods in Physics Research Section B:

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“…The present work does not change that general view. Results for the Au n Ϫ sputtering of Ta [14,15] for 1 Յ n Յ 3 showed that the yield of clusters Ta t ϩ 5 Յ t Յ 12 exhibited an intensity dependence that fitted an exponential form…”

mentioning

confidence: 99%

“…It is important to understand if this is a generic effect in SIMS or if it is limited, in some way, to organic materials. One of the major sets of work on the intensities of many secondary ions as a function of cluster primary ion size is the study of the sputtering of elemental solids by Belykh and coworkers [13][14][15][16][17][18][19]. These studies show the relative intensities of fragments such as M t Ϯ , where 1 Յ t Յ 20 for the sputtering of M ϭ Nb, Si, and Ta.…”

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confidence: 99%

Relationships between cluster secondary ion mass intensities generated by different cluster primary ions

Seah

Green

Gilmore

2010

J. Am. Soc. Mass Spectrom.

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Measurements are described to evaluate the constitution of secondary ion mass spectra for both monatomic and cluster primary ions. Previous work shows that spectra for different primary ions may be accurately described as the product of three material-dependent component spectra, two being raised to increasing powers as the cluster size increases. That work was for an organic material and, here, this is extended to (SiO 2 ) t OH Ϫ clusters from silicon oxide sputtered by 25 keV Bi n ϩ cluster primary ions for n ϭ 1, 3, and 5 and 1 Յ t Յ 15. These results are described to a standard deviation of 2.4% over 6 decades of intensity by the product of a constant with a spectrum, H SiOH ‫ء‬ , and a power law spectrum in t. This evaluation is extended, using published data for Si t ϩ sputtered from Si by 9 and 18 keV Au Ϫ and Au 3 Ϫ , with confirmation that the spectra are closely described by the product of a constant with a spectrum, H Si ‫ء‬ , and a simple spectrum that is an exponential dependence on t, both being raised to appropriate powers. This is confirmed with further published data for 6, 9, 12, and 18 keV Al Ϫ and Al 2 Ϫ primary cluster ions. In all cases, the major effect of intensity is then related to the deposited energy of the primary ion at the surface. The constitution of SIMS spectra, for monatomic and cluster primary ion sources, is shown, in all cases, to be consistent with the product of a constant with two component spectra raised to given powers. (J Am Soc Mass Spectrom 2010, 21, 370 -377) © 2010 American Society for Mass Spectrometry T he analysis of complex molecules in SIMS has been enhanced in recent years by the application of primary cluster ions of the type Au n Ϯ , Bi n ϩ , C 60 nϩ , etc. These provide significantly higher yields of the larger fragments that are important in the analysis of larger molecules. Over the years, there has not been a great focus on the relative intensities of the many secondary ions in the spectrum and their changes with the change in primary ion cluster size and energy. Analysts have usually focused on the enhancement of intensity of a particular characteristic ion obtained when using larger cluster primary ions. However, the fragment ions in the spectrum can be used to construct the structure of the molecules or the arrangement of atoms at a surface as well as provide important data as a function of depth in depth profiles [1][2][3][4][5][6][7][8]. Studies of the whole secondary ion spectrum and its evolution from one primary ion source to another are an important part of the infrastructure to the whole field of secondary ion mass spectrometry.Much historical data and data in spectral libraries [9 -11] are for inert gas primary ions. Over the years, the primary ion sources used have changed and changed again. Different spectrometer manufacturers fit different primary ion sources. It is important, therefore, if analysts are to make the best use of their instruments and of the published literature and data sources, that the relationships for the secondary ion ...

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Water‐Soluble Self‐Assembled Butadiyne‐Bridged Bisporphyrin: A Potential Two‐Photon‐Absorbing Photosensitizer for Photodynamic Therapy

Ogawa

Satake

et al. 2007

Chemistry A European J

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We have synthesized a novel, two-photon-absorbing photosensitizer for two-photon-absorption photodynamic therapy (2PA-PDT). The molecule is a butadiyne-bridged porphyrin dimer terminated with two water-soluble porphyrin monomers connected through Zn-imidazolyl self-assembly and covalently linked through olefin metathesis. It has an effective two-photon-absorption (2PA) cross-section value, sigma((2)), of 33 000+/-4600 GM with 5-ns pulses at 890 nm measured by using the open-aperture Z-scan technique. The compound was found to generate singlet oxygen, cytotoxic for tumor cells in photodynamic therapy (PDT), under 2PA conditions by conducting photobleaching experiments with anthracene-9,10-dipropionic acid sodium salt (ADPA).

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Sputtering of Tantalum by Atomic and Molecular Gold Ions: Comparative Study of Yields and Kinetic Energy Distributions of Atomic and Cluster Ions

Cited by 9 publications

References 19 publications

Model for large cluster emission in ion sputtering of metals applied to atomic and polyatomic ion bombardments

Model for large cluster emission in ion sputtering of metals applied to atomic and polyatomic ion bombardments

Relationships between cluster secondary ion mass intensities generated by different cluster primary ions

Water‐Soluble Self‐Assembled Butadiyne‐Bridged Bisporphyrin: A Potential Two‐Photon‐Absorbing Photosensitizer for Photodynamic Therapy

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