Squeeze-Film Effect on Atomically Thin Resonators in the High-Pressure Limit

Dolleman, Robin J.; Chakraborty, Debadi; Ladiges, Daniel R.; Zant, Herre S. J. van der; Sader, John E.; Steeneken, Peter G.

doi:10.1021/acs.nanolett.1c02237

Cited by 10 publications

(5 citation statements)

References 41 publications

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“…In addition, the airflow during the pressure decrease process in the chamber may affect the resonant frequency of the resonator because of gas leakage from the sealed cavity. In the ultrahigh-vacuum region (pressures lower than 5 × 10 –4 mbar) the squeeze damping effect , might also play a role. Furthermore, the thermal conductivity of the ambient air decreases as the pressure decreases, such that the temperature of the graphene membrane increases.…”

Section: Resultsmentioning

confidence: 99%

Nano-optomechanical Resonators for Sensitive Pressure Sensing

Chen

Liu

Hong

et al. 2022

ACS Appl. Mater. Interfaces

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Nanomechanical sensors made from suspended graphene are sensitive to pressure changes. However, these devices typically function by obtaining an electrical signal based on the static displacement of a suspended graphene membrane and so, in practice, have limited sensitivity and operational range. The present work demonstrates an optomechanical Au/graphene membrane-based gas pressure sensor with ultrahigh sensitivity. This sensor comprises a suspended Au/graphene membrane appended to a section of hollow-core fiber to form a sealed Fabry–Pérot cavity. In contrast to conventional nanomechanical pressure sensors, pressure changes are monitored via resonant sensing with an optical readout. A miniature pressure sensor based on this principle was able to detect an ultrasmall pressure difference of 1 × 10–7 mbar in the ultrahigh-vacuum region with a pressure range of 4.1 × 10–5 to 8.3 × 10–6 mbar. Furthermore, this pressure sensor can work over an extended pressure range of 7 × 10–6 mbar to 1000 mbar at room temperature, outperforming commercial pressure sensors. Similar results were obtained using both the fundamental and higher-order resonant frequencies but with the latter providing improved sensitivity. This sensor has a wide range of potential applications, including indoor navigation, altitude monitoring, and motion detection.

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Section: Resultsmentioning

confidence: 99%

Nano-optomechanical Resonators for Sensitive Pressure Sensing

Chen

Liu

Hong

et al. 2022

ACS Appl. Mater. Interfaces

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“…Also, graphene has an ultrahigh thermal conductivity , and fatigue life, which combined with its high Young’s modulus, , low mass density, , and large surface area make graphene a strong candidate for resonant sensors . Since the first realization of graphene mechanical resonators by Bunch et al, many experimental , and theoretical studies have shown that graphene resonators promise to be ultrasensitive detectors of force, − mass, − and charge …”

Section: Introductionmentioning

confidence: 99%

Enhanced Pressure Response of Edge-Deposited Graphene Nanomechanical Resonators

Wan,

Li,

et al. 2024

ACS Appl. Mater. Interfaces

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Nanomechanical resonators made of suspended graphene exhibit high sensitivity to pressure changes. Nevertheless, the graphene resonator pressure performance is affected owing to the gas permeation problem between the graphene film and the substrate. Therefore, we prepared edge-deposited graphene resonators by focused ion beam (FIB) deposition of SiO 2 , and their gas leakage velocities and pressure-sensing ability were demonstrated. In this paper, we characterize the pressure-sensing response and gas leakage velocities of graphene membranes using an all-optical actuation system. The gas leakage velocities of graphene resonators with diameters of 10, 20, and 40 μm are reduced by 5.0 × 10 6 , 2.0 × 10 7 , and 8.1 × 10 7 atoms/s, respectively, which demonstrates that the edge deposition structure can reduce the gas leakage of the resonator. Furthermore, the pressure-sensing performance of three graphene resonators with different diameters was evaluated, and their average pressure sensitivities were calculated to be 3.4, 2.4, and 1.9 kHz/ kPa, with the largest full-range hysteresis errors of 0.6, 0.7, and 1.0%, respectively. The temperature stabilities of the three sizes of resonators in the temperature range of 300−400 K are 0.016, 0.015, and 0.016%/K, and the maximum resonance frequency drift over 1 h is 0.0058, 0.0048, and 0.0112%, respectively. This work has great significance for the improvement of gas leakage velocity characterization of graphene membrane and graphene resonant pressure sensor performance optimization.

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“…Along with this comes a massively reduced effective mass, increased resonance frequencies, easily accessible non-linearity, and the ability to tune resonance frequencies [9]. This technological boost allows using such resonators as sensors for light [10], magnetic fields [11,12], sound [6,[13][14][15], gases [6,16] or even to study live bacteria [17].…”

Section: Introductionmentioning

confidence: 99%

Nanomechanical absorption spectroscopy of 2D materials with femtowatt sensitivity

Kirchhof

Yagodkin

et al. 2023

2D Mater.

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Nanomechanical spectroscopy (NMS) is a recently developed approach to determine optical absorption spectra of nanoscale materials via mechanical measurements. It is based on measuring changes in the resonance frequency of a membrane resonator vs. the photon energy of incoming light. This method is a direct measurement of absorption, which has practical advantages compared to common optical spectroscopy approaches. In the case of two-dimensional (2D) materials, NMS overcomes limitations inherent to conventional optical methods, such as the complications associated with measurements at high magnetic fields and low temperatures. In this work, we develop a protocol for NMS of 2D materials that yields two orders of magnitude improved sensitivity compared to previous approaches, while being simpler to use. To this end, we use electrical sample actuation, which simplifies the experiment and provides a reliable calibration for greater accuracy. Additionally, the use of low-stress silicon nitride membranes as our substrate reduces the noise-equivalent power to NEP = 890 fW/√Hz, comparable to commercial semiconductor photodetectors. We use our approach to spectroscopically characterize a two-dimensional transition metal dichalcogenide (WS2), a layered magnetic semiconductor (CrPS4), and a plasmonic supercrystal consisting of gold nanoparticles.

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Squeeze-Film Effect on Atomically Thin Resonators in the High-Pressure Limit

Cited by 10 publications

References 41 publications

Nano-optomechanical Resonators for Sensitive Pressure Sensing

Nano-optomechanical Resonators for Sensitive Pressure Sensing

Enhanced Pressure Response of Edge-Deposited Graphene Nanomechanical Resonators

Nanomechanical absorption spectroscopy of 2D materials with femtowatt sensitivity

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