SR phase contrast imaging to address the evolution of defects during SiC growth

Argunova, T. S.; Gutkin, M. Yu.; Je, Jung Ho; Мохов, Е. Н.; Nagalyuk, S. S.; Hwu, Y.

doi:10.1002/pssa.201026341

Cited by 7 publications

(9 citation statements)

References 22 publications

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“…This has been applied to the investigation of Al:SiC metal matrix composites (MMCs) by Buffiere and co-workers who were able to identify rupture of the SiC particles as the starting point of plastic deformation [84,85,86]. Growth defects in SiC such as micropipes have been examined using white-beam phase-contrast [87], sometimes paired with Bragg diffraction [88]. Phase-contrast micro-tomography has also been applied to the analysis of wetting characteristics of functionally graded Al/SiC MMCs [89].…”

Section: Reviewmentioning

confidence: 99%

In-Line Phase-Contrast X-ray Imaging and Tomography for Materials Science

2012

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X-ray phase-contrast imaging and tomography make use of the refraction of X-rays by the sample in image formation. This provides considerable additional information in the image compared to conventional X-ray imaging methods, which rely solely on X-ray absorption by the sample. Phase-contrast imaging highlights edges and internal boundaries of a sample and is thus complementary to absorption contrast, which is more sensitive to the bulk of the sample. Phase-contrast can also be used to image low-density materials, which do not absorb X-rays sufficiently to form a conventional X-ray image. In the context of materials science, X-ray phase-contrast imaging and tomography have particular value in the 2D and 3D characterization of low-density materials, the detection of cracks and voids and the analysis of composites and multiphase materials where the different components have similar X-ray attenuation coefficients. Here we review the use of phase-contrast imaging and tomography for a wide variety of materials science characterization problems using both synchrotron and laboratory sources and further demonstrate the particular benefits of phase contrast in the laboratory setting with a series of case studies.

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Section: Reviewmentioning

confidence: 99%

In-Line Phase-Contrast X-ray Imaging and Tomography for Materials Science

2012

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“…On top of these, SiC single crystal is attractive for being the substrate in the heteroepitaxial growth of other important materials [5][6][7]. These applications require polytypic stable, large diameter SiC single crystals with low density of defects including micropipes, voids, dislocations, domains and stacking faults [8][9][10][11][12][13][14][15][16][17][18][19]. However, there are still issues need to be addressed in order to meet the increasing demands of high quality in some specific fields of applications.…”

Section: Introductionmentioning

confidence: 99%

Characterizations and formation mechanism of a new type of defect related to nitrogen doping in SiC crystals

et al. 2014

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Here, we report a commonly occurring defect related to nitrogen doping in silicon carbide crystals grown by physical vapor transport method while its formation mechanism has remained unclear. It is often mislabeled as planar hexagonal void defect (PHVD) owing to their similar in shape and size on wafer surface. Our results indicate that this is a new type of defect and differs from PHVD with respect to their nitrogen concentrations, void shapes and the connections to micropipe. We found that the carbon-rich vapor during the crystal growth is responsible for the formation of this type of defect. A possible three-stage defect developing mechanism and measures to avoid the defects are proposed.

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“…Micropipes are known to nucleate at second phase inclusions, 3 foreign polytype boundaries, 4 cavities, 5,6 etc. in the shape of a cylinder with circular or elliptic cross section.…”

Section: Introductionmentioning

confidence: 99%

Capsule-like voids in SiC single crystal: Phase contrast imaging and computer simulations

Kohn

Argunova

2014

AIP Advances

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The results of observation of capsule-like voids in silicon carbide (6H-SiC) single crystal by means of a phase contrast imaging technique with synchrotron radiation at the Pohang Light Source as well as computer simulations of such images are presented. A pink beam and a monochromated beam were used. The latter gives more pronounced images but they still are smoothed due to a finite detector resolution and the spatial coherence of the beam. Sizes and a structure of far field images are different from these of the objects. The computer simulations allow us to reproduce a shape and a size of the capsule-like void.

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SR phase contrast imaging to address the evolution of defects during SiC growth

Cited by 7 publications

References 22 publications

In-Line Phase-Contrast X-ray Imaging and Tomography for Materials Science

In-Line Phase-Contrast X-ray Imaging and Tomography for Materials Science

Characterizations and formation mechanism of a new type of defect related to nitrogen doping in SiC crystals

Capsule-like voids in SiC single crystal: Phase contrast imaging and computer simulations

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