SrTiO3 and (Ba,Sr)TiO3 Films Epitaxially Grown on SrRuO3 Using Atomic Layer Deposition

Park, Bo-Eun; Lee, Jaeho; Bang, Jeongil; Do, Euncheol; Kim, Eunsun; An, Cheolhyun; Park, Seong Yong; Lee, Sangjun; Yun, Dong-Jin; Lee, Jooho; Kim, Yongsung; Kim, Hyung-Jun

doi:10.1021/acsami.4c10400

ACS Appl. Mater. Interfaces

2024

DOI: 10.1021/acsami.4c10400

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SrTiO₃ and (Ba,Sr)TiO₃ Films Epitaxially Grown on SrRuO₃ Using Atomic Layer Deposition

Bo-Eun Park,

Jaeho Lee,

Jeongil Bang

et al.

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SrTiO₃ and (Ba,Sr)TiO₃ Films Epitaxially Grown on SrRuO₃ Using Atomic Layer Deposition

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References 38 publications

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