Stability Analysis of Multi Process Parameters for Metal-Organic Chemical Vapor Deposition Reaction Cavity

Li, Jian; Wu, Ziling; Xu, Yifeng; Pei, Yanli

doi:10.3390/molecules24050876

Cited by 9 publications

(6 citation statements)

References 41 publications

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“…In further contexts, utilising theoretical calculation and artificial intelligence would help reduce the costs of manpower, resources and time to a certain extent. [86][87][88][89][90][91] Li et al established a transport reaction model for ZnO growth using diethylzinc and H 2 O through theoretical calculations, based on an MD600B ZnO-MOCVD system as a prototype (Fig. 11g).…”

Section: Equipment Construction Toward Scalable Production Of Transfe...mentioning

confidence: 99%

Recent advances in batch production of transfer-free graphene

Fang,

Zhou,

Wei

et al. 2024

Nanoscale

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Section: Equipment Construction Toward Scalable Production Of Transfe...mentioning

confidence: 99%

Recent advances in batch production of transfer-free graphene

Fang,

Zhou,

Wei

et al. 2024

Nanoscale

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“…However, there are some difficulties in synthesizing alloy powders, because non-uniformity may occur due to the difference in vapor pressure during the vaporizing stage. Additionally, the production cost is also high [11][12][13][14][15][16].…”

Section: Introductionmentioning

confidence: 99%

Conductive Powder Synthesis Technology for Improving Electrical Conductivity by One-Pot Ultrasonic Spray Pyrolysis Process

Koo¹,

Park²

2023

New Advances in Powder Technology

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In this chapter, we will study the spray pyrolysis process, which is a bottom-up process, and examine the composite electrode powder synthesis process and properties of the core-shell structure. Generally, it is difficult to produce fine particles from metal powders using the top-down method. Thus, the liquid phase method, which is a bottom-up process, is mainly used. However, the liquid phase method has a problem in that impurities exist in the particles. In addition, it is difficult to control the precipitation when synthesizing powder using a solution containing several types of metal salts. The spray pyrolysis process introduced here made it possible to produce composite particles in a one-pot manner without any additional processes for synthesizing the core-shell structure. In the case of core-shell structure of Ag-glass composite powder, the specific resistance of the composite electrode was significantly lowered, compared to the electrode formed by mixing glass frits individually, which improved the dispersibility of the glass. In the case of Cu composite particles with a coating layer, both Ag and glass coating layers formed a passivation layer to improve atmospheric stability, and the introduction of a coating material also improved electrical properties.

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“…In addition, the GaAs film solar cell is among the GaN film growth in a commercial MOCVD reactor. Li et al [16] investigated the influence of multi-process parameters stability on properties of ZnO film.…”

Section: Introductionmentioning

confidence: 99%

“…Li et al. [ 16 ] investigated the influence of multi‐process parameters stability on properties of ZnO film.…”

Section: Introductionmentioning

confidence: 99%

Design Optimization of Gas Distribution System for Large‐Scale Capacity GaAs‐MOCVD

Yu,

Shen,

et al. 2023

Cryst. Res. Technol.

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In the flexible photovoltaic (PV) industry, increment of the metal‐organic chemical vapor deposition (MOCVD) deposition zone is crucial to reducing the cost of ownership and increasing the power conversion efficiency (PCE). This implies that the larger closed coupled showerhead (CCS) of MOCVD system should be used in the manufacture of flexible gallium arsenide (GaAs) PV thin‐film solar cells. Currently, Aixtron Crius II is the largest commercial CCS reactor for GaAs deposition with 55 × 2 inches circular wafers. As the size of the carrier and showerhead increases, the deposition uniformity and gas flow stability become more difficult to control. To address these issues, previous studies have investigated the effects of geometric and process parameters of MOCVD on the vertical process gas inlet, with either a rotating carrier model represented by Veeco using high‐speed rotating carrier (Turbo Disc), and Aixtron using low‐speed rotating planetary carrier, or a horizontal process gas injector with a rotating carrier. However, these efforts have limited further capacity scale‐up. In this study, numerical simulations and fluid visualization experiments are conducted, based on previous research on thermal uniformity, for design optimization of a gas distribution system in a large square GaAs‐MOCVD reactor. The achieved reactor capacity is 36 × 4 inches square wafers in one process cycle, and the optimal average deposition rate and deposition uniformity of GaAs film are ≈0.430 µm min−1 and 0.93%, respectively.

show abstract

Stability Analysis of Multi Process Parameters for Metal-Organic Chemical Vapor Deposition Reaction Cavity

Cited by 9 publications

References 41 publications

Recent advances in batch production of transfer-free graphene

Recent advances in batch production of transfer-free graphene

Conductive Powder Synthesis Technology for Improving Electrical Conductivity by One-Pot Ultrasonic Spray Pyrolysis Process

Design Optimization of Gas Distribution System for Large‐Scale Capacity GaAs‐MOCVD

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