“…The experimental results were used to determine the guard threshold fluence for each type of coating when experiencing some damage following proton irradiation. It is well-known that for fluences above of 10 17 cm –2 , low-energy ions implanting in metals, such as W, Au, and Cu, can result in bubble formation. − A sponge-like morphology was observed in the case of gold films, associated with bubbles whose size increases with the fluence and forming large blisters for fluences of the order of 5 × 10 17 cm –2 . , Various experiments of H- and He-ion irradiation on metal thin-film multilayers used in nuclear physics were carried out, − as well as for components used in lithographic apparatus. − The irradiation of charged particles can induce charge accumulation and alter the optical performance of extreme-ultraviolet multilayers via changes in the surface morphology and optical and structural characteristics, which, in the worst cases, can result in major damages, such as delamination and blistering. − More data come from recent experiments that test Al and Ag metallic coatings for space applications and in particular with He-ion irradiation, which however do not define the damage thresholds for which the formation of these bubbles determines a degradation of the optical properties. In particular, common metal coatings, such as Al and Au thin films, have not been systematically studied so far.…”