1993
DOI: 10.1149/1.2221628
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Stability of Diborane Mixtures Used for Borophosphosilicate Glass Films

Abstract: One contributing factor in the nonattainment of proper boron concentrations in borophosphosilicate glass films is the variability of the diborane concentration in gas mixtures used in the process. We describe an analytical procedure that allows the monitoring of small changes in diborane concentrations utilizing an internal reference standard in the gas mixture. Employing this procedure, the decomposition kinetics of diborane mixtures prepared in steel cylinders with concentrations of less than 10% was investi… Show more

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“…Furthermore, the as‐formed diborane shown in Equation (1) may react with oxygen and water present in the reaction medium to form oxides of boron (the presence of the B−O bond is corroborated by FTIR spectroscopy, as detailed below) as shown in Equations true21.69998ptB2H6+31.69998ptO221.69998ptB2O3+61.69998ptH24pt trueB2H6+31.69998ptH2normalOB2O3+61.69998ptH24pt …”
Section: Resultsmentioning
confidence: 91%
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“…Furthermore, the as‐formed diborane shown in Equation (1) may react with oxygen and water present in the reaction medium to form oxides of boron (the presence of the B−O bond is corroborated by FTIR spectroscopy, as detailed below) as shown in Equations true21.69998ptB2H6+31.69998ptO221.69998ptB2O3+61.69998ptH24pt trueB2H6+31.69998ptH2normalOB2O3+61.69998ptH24pt …”
Section: Resultsmentioning
confidence: 91%
“…However, the GC–MS analysis suggests that the evolved gases are heavier boron hydrides. Thus, we posit that the diborane formed in Equation (1) may dissociate to form heavier boron hydrides [as shown in Equation (2)], and depending on the nuclearity of the boron hydrides, they form as volatile compounds, which are released as gases [Eq. ]. trueB2H6normalhnormalenormalanormalvnormalinormalenormalr_normalbnormalonormalrnormalonormaln_normalhnormalynormaldnormalrnormalinormaldnormalenormals+H24pt …”
Section: Resultsmentioning
confidence: 99%