Stability studies of ZnO and AlN thin film acoustic wave devices in acid and alkali harsh environments

Xiong, Shuo; Li, Xudong; Zhou, Jian; Liu, Yi; Shen, Yiping; Yin, Xiaobo; Wu, Jiangning; Tao, Ran; Fu, Yong Qing; Duan, Huigao

doi:10.1039/d0ra02448a

Cited by 18 publications

(19 citation statements)

References 23 publications

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“…[35][36] For ZnO NWs, the peaks at 434 cm -1 and 1150 cm -1 are ascribed to the acoustic overtone of E2H and the optical overtone of ZnO, repectively. 37 Results showed that The Raman spectra of the ZnO nanowire/GQDs have the main characteristic peak of GQDs, demonstrating the existence of GQDs. Figure 2(f) shows elements' distribution in the composite layer of ZnO NWs and GQDs, obtained using the EDS.…”

Section: Resultsmentioning

confidence: 92%

Ultrathin Glass-Based Flexible, Transparent, and Ultrasensitive Surface Acoustic Wave Humidity Sensor with ZnO Nanowires and Graphene Quantum Dots

Yin

Zhou

et al. 2020

ACS Appl. Mater. Interfaces

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101

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Flexible electronic devices are normally based on organic polymer substrate. In this work, ultra-thin glass based flexible, transparent and ultra-sensitive ZnO/glass surface acoustic wave (SAW) humidity sensor is developed using a composite sensing layer of ZnO nanowires (NWs) and graphene quantum dots (GQDs). It shows much larger effective electromechanical coupling coefficients and signal amplitudes, compared with those of flexible polymer based SAW devices reported in literature. Attributed to large specific surface areas of ZnO NWs, large numbers of hydrophilic functional groups of GQDs, as well as the formation of p-n heterojunctions between GQDs and ZnO NWs, the developed ZnO/glass flexible SAW sensor shows an ultra-high humidity sensitivity of 40.16 kHz/%RH, along with its excellent stability and repeatability. This flexible and transparent SAW sensor has demonstrated insignificant deterioration of humidity sensing performance, when it is bent on a curved surface with a bending angle of 30, revealing its potential applications for sensing on curved and complex surfaces. The humidity sensing and human breathing detection have further been demonstrated for wearable electronic applications using ultra-thin glass based devices with completely inorganic materials.

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Section: Resultsmentioning

confidence: 92%

Ultrathin Glass-Based Flexible, Transparent, and Ultrasensitive Surface Acoustic Wave Humidity Sensor with ZnO Nanowires and Graphene Quantum Dots

Yin

Zhou

et al. 2020

ACS Appl. Mater. Interfaces

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101

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“…It creates the acousto-optic effect after interaction with SAW, which is the basic concept of acousto-optic devices [ 47 ]. ZnO, LiNbO 3 , and AlN are used in these structures because of their strong piezoelectric and optical characteristics, as well as the ease with which they are deposited [ 48 , 49 , 50 , 51 , 52 , 53 , 54 , 55 , 56 ]. A material’s k 2 is dependent on characteristics such as dielectric, piezoelectric, and elastic properties.…”

Section: Methodsmentioning

confidence: 99%

FEM Analysis of Various Multilayer Structures for CMOS Compatible Wearable Acousto-Optic Devices

Hanif

Jeoti

Ahmad

et al. 2021

Sensors

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Lately, wearable applications featuring photonic on-chip sensors are on the rise. Among many ways of controlling and/or modulating, the acousto-optic technique is seen to be a popular technique. This paper undertakes the study of different multilayer structures that can be fabricated for realizing an acousto-optic device, the objective being to obtain a high acousto-optic figure of merit (AOFM). By varying the thicknesses of the layers of these materials, several properties are discussed. The study shows that the multilayer thin film structure-based devices can give a high value of electromechanical coupling coefficient (k2) and a high AOFM as compared to the bulk piezoelectric/optical materials. The study is conducted to find the optimal normalised thickness of the multilayer structures with a material possessing the best optical and piezoelectric properties for fabricating acousto-optic devices. Based on simulations and studies of SAW propagation characteristics such as the electromechanical coupling coefficient (k2) and phase velocity (v), the acousto-optic figure of merit is calculated. The maximum value of the acousto-optic figure of merit achieved is higher than the AOFM of all the individual materials used in these layer structures. The suggested SAW device has potential application in wearable and small footprint acousto-optic devices and gives better results than those made with bulk piezoelectric materials.

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“…The ZnO-ZnGaON photoanodes showed stable photocurrent and morphology in the amperometric study after 5.5 h at pH 13. In contrast, ZnO photoanodes were fully etched within 5.5 h. Surface acoustic wave (SAW) devices based on ZnO thin film have been investigated toward flexible sensor and microfluidic applications. , Xiong et al demonstrated SAW device operation based on a ZnO thin film in acid and alkali environments . Grain defects in ZnO thin films increase within 45 s in HCl and NaOH solution, resulting in the failure of device operations.…”

Section: Applications Of Zno In Harsh Electronicsmentioning

confidence: 99%

“…166,167 Xiong et al demonstrated SAW device operation based on a ZnO thin film in acid and alkali environments. 167 Grain defects in ZnO thin films increase within 45 s in HCl and NaOH solution, resulting in the failure of device operations.…”

Section: Applications Of Zno In Harsh Electronicsmentioning

confidence: 99%

Robust and Electrically Conductive ZnO Thin Films and Nanostructures: Their Applications in Thermally and Chemically Harsh Environments

Yan

Takahashi

Zeng

et al. 2021

ACS Appl. Electron. Mater.

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Harsh electronics", which are designed to operate under harsh environments, have garnered significant attention to collect various physical and chemical information in surroundings toward the Internet of Things era. Among various electronic materials and structures, ZnO thin films, which consist of an abundant resource, have been intensively investigated because of their unique electrical and optical properties. However, ZnO thin films have been regarded as chemically nonresistive to harsh environments (e.g., high temperatures, high humidity, and acidic and basic conditions). Herein, we present recent progress and advances in electrically conductive ZnO thin films and nanostructures for applications in harsh electronics. First, various fabrication methods and progresses for achieving high-quality ZnO nanomaterials are introduced. Subsequently, previously reported approaches for enhancing the reliability and stability of ZnO nanostructures in harsh electronics are compared. Strategies for fabricating robust ZnO materials and ZnO-based electronics are discussed on the basis of several proposed mechanisms. Finally, we describe the current limitation, perspective, and outlook for future developments of ZnO nanostructures for use in harsh electronics.

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Stability studies of ZnO and AlN thin film acoustic wave devices in acid and alkali harsh environments

Abstract: Surface acoustic wave (SAW) devices based on piezoelectric thin-films such as ZnO and AlN are widely used in sensing, microfluidics and lab-on-a-chip applications.

Cited by 18 publications

References 23 publications

Ultrathin Glass-Based Flexible, Transparent, and Ultrasensitive Surface Acoustic Wave Humidity Sensor with ZnO Nanowires and Graphene Quantum Dots

Ultrathin Glass-Based Flexible, Transparent, and Ultrasensitive Surface Acoustic Wave Humidity Sensor with ZnO Nanowires and Graphene Quantum Dots

FEM Analysis of Various Multilayer Structures for CMOS Compatible Wearable Acousto-Optic Devices

Robust and Electrically Conductive ZnO Thin Films and Nanostructures: Their Applications in Thermally and Chemically Harsh Environments

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