Stabilization of Cubic AlN in Epitaxial AlN/TiN Superlattices

Madan, A.; Kim, I. W.; Cheng, Sze‐Chuh; Yashar, P.; Dravid, Vinayak P.; Barnett, Scott A.

doi:10.1103/physrevlett.78.1743

Cited by 247 publications

(86 citation statements)

References 20 publications

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“…This value is between those for VN (4.14 Å) and B1-AlN (4.06 Å). 7 This result is consistent with B1-AlN layers but inconsistent with zb-AlN, which has a significantly larger lattice parameter (4.37 Å). XRD simulations showed a much better fit for B1-AlN than for zb-AlN.…”

Section: Resultssupporting

confidence: 78%

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Structures of AlN/VN Superlattices with Different AlN Layer Thicknesses

Kim

Barnett

et al. 2002

J. Mater. Res.

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AlN/VN superlattices with different periods were studied using x-ray diffraction and transmission electron microscopy (TEM). A phase transformation of the AlN from an epitaxially stabilized rock-salt structure to a hexagonal wurtzite structure was observed for an AlN layer thickness greater than 4 nm. A structural model is proposed on the basis of TEM results for the orientation of the transformed phase. The VN layer grown on top of the hexagonal AlN was observed to be reoriented compared to that in the stabilized B1-AlN/VN. The VN nucleated by taking the w-AlN(002) plane as its (111) plane instead of the (002) plane.

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Section: Resultssupporting

confidence: 78%

“…The stabilization of B1-AlN can be explained using a simple energy argument. 7 The total energy per formula unit area of an AlN layer during growth can be written as…”

Section: Discussionmentioning

confidence: 99%

Structures of AlN/VN Superlattices with Different AlN Layer Thicknesses

Kim

Barnett

et al. 2002

J. Mater. Res.

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“…Additionally, the epitaxial stabilization approach was successfully utilized to stabilize cubic AlN in a TiN/AlN superlattice [16,17]. Recently, this technique was also used to stabilize cubic ScxAl1-xN in sandwiched TiN/ScxAl1-xN/TiN structures with up to x=0.82, and subsequently -in cubic TiN/(Al,Sc)N multilayers [18,19].…”

Section: Ab Initio Calculations Show That the Structural Properties Omentioning

confidence: 99%

Stabilization of wurtzite Sc0.4Al0.6N in pseudomorphic epitaxial Sc Al1−N/In Al1−N superlattices

et al. 2015

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Pseudomorphic stabilization in wurtzite ScxAl1-xN/AlN and ScxAl1-xN/InyAl1-yN superlattices (x=0.2, 0.3, and 0.4; y=0.2-0.72), grown by reactive magnetron sputter epitaxy was investigated. X-ray diffraction and transmission electron microscopy show that in ScxAl1-xN/AlN superlattices the compressive biaxial stresses due to positive lattice mismatch in Sc0.3Al0.7N and Sc0.4Al0.6N lead to the loss of epitaxy, although the structure remains layered.For the negative lattice mismatched In-rich ScxAl1-xN/InyAl1-yN superlattices, a tensile biaxial stress promotes the stabilization of wurtzite ScxAl1-xN even for the highest investigated concentration x=0.4. Ab initio calculations with fixed in-plane lattice parameters show a reduction in mixing energy for wurtzite ScxAl1-xN under tensile stress when x≥0.375 and corroborate the experimental results.

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“…At ambient conditions, wurtzite is the most stable phase and the other two metastable phases possess zinc blende [16][17][18] and rock salt crystal structures. The phase transition from wurtzite to rock salt is only reported under shock loading [19][20][21][22][23][24][25][26], or extremely high pressure [20,[26][27][28][29]. By virtue of lower phonon scattering, higher carrier mobility, better ferromagnetic properties, and enhanced light emission efficiency [30][31][32][33], many efforts have been devoted to stabilizing the metastable zinc blende phase in AlN This material is published by permission of the Los Alamos National Lab, operated by Los Alamos National Security under Contract No.…”

mentioning

confidence: 99%