2006
DOI: 10.1016/j.jcis.2006.04.046
|View full text |Cite
|
Sign up to set email alerts
|

Stabilization of gamma alumina slurry for chemical–mechanical polishing of copper

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
11
0

Year Published

2007
2007
2021
2021

Publication Types

Select...
6
1

Relationship

0
7

Authors

Journals

citations
Cited by 32 publications
(11 citation statements)
references
References 32 publications
0
11
0
Order By: Relevance
“…Particle size distribution was measured on a laser particle size analyzer (Malvern E‐3600, Malvern Instruments, Worcestershire, U.K.). In 12 h of milling, the average particle size of alumina reduced from 35 to 8 μm, and to 3.5 μm in 24 h. The pH of the slurry increased from 2.5 to 3.5 during milling, most likely due to Na 2 O eluted from the inner domain of γ‐alumina particles 14 . The milled alumina was dried and stored for further use.…”
Section: Methodsmentioning
confidence: 99%
“…Particle size distribution was measured on a laser particle size analyzer (Malvern E‐3600, Malvern Instruments, Worcestershire, U.K.). In 12 h of milling, the average particle size of alumina reduced from 35 to 8 μm, and to 3.5 μm in 24 h. The pH of the slurry increased from 2.5 to 3.5 during milling, most likely due to Na 2 O eluted from the inner domain of γ‐alumina particles 14 . The milled alumina was dried and stored for further use.…”
Section: Methodsmentioning
confidence: 99%
“…For instance, polymer-metal complexation is used for the removal of toxic metal ions in wastewater treatment [1][2][3][4][5][6][7][8] and for the preparation of improved catalysts in catalytic reactions. [9][10][11] Moreover, the exploitation of polymermetal complexation in hydrogels or polymer-modified surfaces is very promising for several potential smart applications, such as redox actuators, 6 metal-ion-selective electrodes, [12][13][14] and electroswitchable devices. 15 The complexation of Cu 21 ions with carboxyl-containing polymers or gels, such as poly(acrylic acid) (PAA) and poly(methacrylic acid) (PMAA), has been widely studied with a variety of techniques, both in water and in the solid state.…”
Section: Introductionmentioning
confidence: 99%
“…For instance, polymer–metal complexation is used for the removal of toxic metal ions in wastewater treatment1–8 and for the preparation of improved catalysts in catalytic reactions 9–11. Moreover, the exploitation of polymer–metal complexation in hydrogels or polymer‐modified surfaces is very promising for several potential smart applications, such as redox actuators,6 metal‐ion‐selective electrodes,12–14 and electroswitchable devices 15…”
Section: Introductionmentioning
confidence: 99%
“…For instance, polymer/metal complexation has been applied for the removal of toxic metal ions in waste‐water treatment1–9 or for the preparation of improved catalysts in catalytic reactions 10–13. Moreover, recently, several potential ‘smart’ applications, like redox actuators,14 metal ion selective electrodes,15–17 or electroswitchable devices18 have been proposed based on polymer/metal complexation.…”
Section: Introductionmentioning
confidence: 99%