Stabilizing effect of diamond thin film on nanostructured silicon carbide field emission array

Abstract

Silicon carbide field emission arrays (FEA) are at the forefront of development as new promising electron sources for vacuum microelectronic devices. The authors present a new process for the fabrication of array of nanoscale tips with reduced heterogeneity of their heights. The characterization results show that at strong electric fields the heterogeneity is a key factor causing current instability. Diamond is recognized as the best material to obtain field emission, but fabrication of tip array with a reasonable aspect ratio is a challenge. Therefore, the authors have combined the benefits of both the abovementioned materials and fabricated silicon carbide FEA of tips coated with nanocrystalline undoped diamond thin film. The coating smoothens the virtual emitting surface connecting the tips, and therefore reduces heterogeneity of their heights, thereby improving the current stability. Current fluctuation decreased to 5% in compare with 23% in FEA without coating.

Vacuum electronics: renaissance or stagnation

“…В статье [5] представлены результаты формирования матрицы наноразмерных остриев с уменьшенным разбросом их высот. Результаты измерений показывают, что при высокой напряженности электрического поля неоднородность высот остриев является ключевым фактором нестабильности тока.…”

“…The paper [5] presents the results of the formation of a matrix of nanoscale points with a reduced scatter of their heights. The results of the measurements show that, at high electric field strengths the inhomogeneity of the tip heights is a key factor of current instability.…”