The impact of plating parameters on the porosity of cobalt hard gold electrodeposited from a cyanide bath is presented. Both constant current and pulsed current deposition were studied by electrochemical and microscopy methods. As observed previously, pores tend to decorate grain boundaries, defects, and other morphology features. Focused ion beam scanning electron microscopy indicates that perhaps only a small fraction of pores seen on the surface of the ϳ350 nm thick gold film extends to the electroplated Ni underlayer. The density of pores depends on morphology and current efficiency, both of which were found to vary significantly with plating conditions. Faceted surface features correlate with a higher pore density. For a similar morphology, the pore density increases with the hydrogen generation rate, estimated from current efficiency measurements. Pulse plating conditions, with relatively high peak current and frequency, result in deposits with lower porosity due to the capability of generating finer grains while influencing hydrogen evolution rates. © 2010 The Electrochemical Society. ͓DOI: 10.1149/1.3430076͔ All rights reserved. Electrochemically deposited cobalt hard gold is important in connector applications because of its favorable properties, including low contact resistance, high corrosion resistance, and high wear resistance.1 The high price of gold and its considerable usage make it an important task to improve gold deposit properties, allowing potential reduction in gold usage. A major impediment to reducing gold film thickness is the corrosion of the underlying substrate, the rate of which is directly impacted by the porosity of the gold layer. The porosity of various electrodeposited metal coatings was reviewed by Notter and Gabe.3 For hard gold, the porosity has been investigated on several occasions including studies of the methodology for porosity evaluation, 4 the performance evaluation of different plating bath compositions and plating techniques, 2,5 the correlation between porosity and film thickness, 6 and the structural study of the electrodeposits.5,7-9 However, to the best of our knowledge, the fundamental factors that affect porosity have not yet been identified and investigated systematically. Some related studies can be divided into two categories: One is from the structural viewpoint and the other is about hydrogen evolution.Among various methods for studying porosity, structural studies by electron microscopy 3 have been helpful for the characterization of pore shape and size. Researchers 7,8 found that the pores predominately appear at the boundaries of features ͑or grains͒ of the microstructure and are uniformly round, suggesting that they were formed by hydrogen bubbles produced during the plating process. In an attempt to explain the effect of deposit morphology on porosity, Popov et al. 10,11 explained the relationship between porosity and roughness for nickel electrodeposits. For gold electroplating, such analysis has not yet been performed.Regarding hydrogen evolution, w...