2006 IEEE 4th World Conference on Photovoltaic Energy Conference 2006
DOI: 10.1109/wcpec.2006.279753
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Stable, high deposition rate, wide gap silicon for the rather thick top cells in thin film silicon multibandgap solar cells

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Cited by 3 publications
(6 citation statements)
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“…Deposition of device quality hydrogenated nano-crystalline silicon (nc-Si:H) as an absorber layer in solar cells takes rather long (>30 min). With hydrogenated amorphous silicon (a-Si:H) it is possible to reach deposition rates for de-vice quality material that allow the absorber layer to be deposited within 5 minutes, especially if HWCVD [2] is used rather than radio-frequent (RF) PECVD.…”
mentioning
confidence: 99%
“…Deposition of device quality hydrogenated nano-crystalline silicon (nc-Si:H) as an absorber layer in solar cells takes rather long (>30 min). With hydrogenated amorphous silicon (a-Si:H) it is possible to reach deposition rates for de-vice quality material that allow the absorber layer to be deposited within 5 minutes, especially if HWCVD [2] is used rather than radio-frequent (RF) PECVD.…”
mentioning
confidence: 99%
“…Proto-Si:H was deposited from undiluted SiH 4 , whereas H 2 - [3,9]. Two types of substrates were used: a Ag/ZnO TBR made on stainless steel (SS) foil in our laboratory [10,11] and a SS/Ag/ ZnO substrate provided to us by United Solar Ovonic LLC Corporation. Indium-tin-oxide served as an anti-reflecting TCO top window; an evaporated gold grid on top facilitated a proper charge carrier collection.…”
Section: Methodsmentioning
confidence: 99%
“…Indium-tin-oxide served as an anti-reflecting TCO top window; an evaporated gold grid on top facilitated a proper charge carrier collection. Both the metal oxide layers and the textured Ag of the TBR were deposited by magnetron sputtering in our SALSA system [10,11]. The active area of the solar cells was 0.13 cm 2 .…”
Section: Methodsmentioning
confidence: 99%
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“…based on the work described in [30]. Two types of substrates were used: a Ag/ZnO TBR made on stainless steel (SS) foil in our laboratory [31,32] using our in-house Ag/ZnO magnetron sputtering tool SALSA, where the texture of the Ag surface is obtained using elevated substrate temperatures, and a SS/Ag/ZnO substrate provided by United Solar Ovonic LLC Corporation, for comparison.…”
Section: Ecs Transactions 25 (8) 3-14 (2009)mentioning
confidence: 99%