2020
DOI: 10.1364/josaa.398644
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State-of-the-art active optical techniques for three-dimensional surface metrology: a review [Invited]

Abstract: This paper reviews recent developments of non-contact three-dimensional (3D) surface metrology using an active structured optical probe. We focus primarily on those active non-contact 3D surface measurement techniques that could be applicable to the manufacturing industry. We discuss principles of each technology, and its advantageous characteristics as well as limitations. Towards the end, we discuss our perspectives on the current technological challenges in designing and i… Show more

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Cited by 178 publications
(62 citation statements)
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“…In the two-step process, a digital holographic interference pattern is generated and split into a reference beam and a measurement beam, and then the beams returned from the target surface is merged and recorded simultaneously. The recorded hologram of the target surface carries both the amplitude and phase of the returned beam, and the surface can be reconstructed based on it [45,46]. Because LHI relies on the phase shift measurement, it can only achieve vertical resolution at hundreds of nanometers and lateral resolution at micrometers.…”
Section: Lhimentioning
confidence: 99%
“…In the two-step process, a digital holographic interference pattern is generated and split into a reference beam and a measurement beam, and then the beams returned from the target surface is merged and recorded simultaneously. The recorded hologram of the target surface carries both the amplitude and phase of the returned beam, and the surface can be reconstructed based on it [45,46]. Because LHI relies on the phase shift measurement, it can only achieve vertical resolution at hundreds of nanometers and lateral resolution at micrometers.…”
Section: Lhimentioning
confidence: 99%
“…After the deformation image is captured by the camera, the information of the object surface is demodulated by the relevant reconstruction algorithm to perform 3D measurement for the object. Currently, the fringe-projection-based surface profile measurement has been widely used due to advantages such as no contact, high speed, high accuracy, and so on [ 1 , 2 , 3 , 4 ]. Among all of the fringe projection techniques, phase calculation plays a crucial role in profile measurement [ 5 ].…”
Section: Introductionmentioning
confidence: 99%
“…Fringe projection profilometry (FPP) has been widely used in 3-D shape measurement due to its merits of measuring dense 3-D data with high accuracy and speed [ 15 , 16 ]. It enables numerous industrial workpiece measurements, such as composite panel [ 17 ], honeycomb core structures [ 18 ], and thermal forging parts [ 19 ], and other applications [ 20 , 21 , 22 ].…”
Section: Introductionmentioning
confidence: 99%
“…If dense 3-D data is obtained, dimension parameters and surface cracks can be easily extracted. However, for non-diffuse and stepwise objects, the measurement accuracy is seriously affected [ 16 ]. The glitter of the metal surface can generate a saturated region [ 23 ], whereas the stepwise shape results in phase mixture along sharp edges [ 24 ].…”
Section: Introductionmentioning
confidence: 99%