2023
DOI: 10.1016/j.jcrysgro.2023.127276
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State-of-the-art and prospective progress of growing AlN substrates by physical vapor transport

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Cited by 11 publications
(2 citation statements)
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“…As the typical representative of the wide band gap semiconductor, aluminum nitride (AlN) crystals have the advantages of wide band gap (6.2 eV), high saturated carrier drift velocity, high thermal stability, high breakdown field strength, and high surface acoustic velocity. It has good application prospects in the preparation of high-temperature, high-frequency, high-power electronic devices, especially in blue-UV solid-state laser diodes, lasers, and GaN-based high-electron-mobility transistors (HEMT) devices and substrates for solar blind AlGaN ultraviolet detector devices. At present, the PVT (physical vapor transport) method is widely recognized as the effective way to prepare large-sized AlN single crystals due to its advantages such as the fast growth rate and high crystalline quality. …”
Section: Introductionmentioning
confidence: 99%
“…As the typical representative of the wide band gap semiconductor, aluminum nitride (AlN) crystals have the advantages of wide band gap (6.2 eV), high saturated carrier drift velocity, high thermal stability, high breakdown field strength, and high surface acoustic velocity. It has good application prospects in the preparation of high-temperature, high-frequency, high-power electronic devices, especially in blue-UV solid-state laser diodes, lasers, and GaN-based high-electron-mobility transistors (HEMT) devices and substrates for solar blind AlGaN ultraviolet detector devices. At present, the PVT (physical vapor transport) method is widely recognized as the effective way to prepare large-sized AlN single crystals due to its advantages such as the fast growth rate and high crystalline quality. …”
Section: Introductionmentioning
confidence: 99%
“…However, the conventional PVT method relies on the sublimation of AlN powder, which demands extremely high temperatures (2000-2300 • C). The strong activity of Al vapor at such temperatures usually poses challenges, leading to the corrosion and deterioration of reactor parts and crucibles [9]. Alternatively, the vaporization of Al metal in a nitrogen (N 2 ) atmosphere could present a promising avenue for growing AlN at lower temperatures [10].…”
Section: Introductionmentioning
confidence: 99%