Static and dynamic determination of the mechanical properties of nanocrystalline diamond micromachined structures

Abstract

We present the static and dynamic mechanical characterization of several nanocrystalline diamond (NCD) freestanding micromachined structures. NCD films, fabricated by microwave plasma chemical vapour deposition on silicon (1 0 0), were underetched in order to release the test structures. Two different techniques are combined for the mechanical characterization, atomic force microscopy (AFM) and magnetomotive resonant frequency spectroscopy. The static Young's modulus (E) of the micromachined structures was calculated from the AFM measurements, resulting in E = 947 ± 40 GPa. This value is in excellent agreement with the determination of an acoustic velocity of 17 283 ± 232 m s−1, calculated from the resonance frequency of double-clamped structures and coupled single-clamped U-frame resonators.

High Young’s modulus in ultra thin nanocrystalline diamond

“…The higher values of Young's modulus reported here have also been confirmed by the resonant frequencies of magneto-motive double clamped cantilever devices and AFM implemented force-deflection characterisation of single clamped cantilevers fabricated with the same NCD films [35].…”

Fabrication and micromechanical characterization of polycrystalline diamond microcantilevers

“…values are higher than data in the literature (Sillero et al 2009). In this method, the computation of elastic coefficient value takes in account length and thickness data for each cantilever and thus, we must consider measurement uncertainty of these two parameters.…”

“…However, it is difficult to specify values for mechanical properties of a diamond film because these properties are strongly dependent of its synthesis conditions (Scorsone et al 2009;Gad-el-Hak 2001;Garcia et al 1993;Sillero et al 2009;Adiga et al 2009;Claude et al 1992). Most of characterization techniques require manufacturing of special structures or special test set-up (Petersen 1978).…”

Characterization of Irreversible Kinase Inhibitors by Directly Detecting Covalent Bond Formation: A Tool for Dissecting Kinase Drug Resistance

“…For reference measurements, resonators based on AlN, SiC, and diamond active layers have been realized using the technology described in Refs. 58, 76, 81, 83, 84. These well‐defined microstructures were analyzed employing the described experimental techniques in order to proof the reliability of the analyzing techniques.…”