2004
DOI: 10.1103/physreve.70.051606
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Statistical characterization of thermally evaporated roughCaF2films

Abstract: Thermal deposition of CaF2 onto a glass substrate creates a nanoscale rough surface. A series of samples with differing nominal CaF2 film thicknesses have been fabricated, and the topography has been investigated using atomic force microscopy. Measured values for the statistical characterization of the samples are presented including the exponents describing the scaling behavior of the surfaces. We find that the roughness exponent alpha=0.88+/-0.03 , the growth exponent beta=0.75+/-0.03 , and the dynamical exp… Show more

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Cited by 11 publications
(2 citation statements)
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“…It is well known that deposition of CaF 2 thin films result in a roughened surface with root-mean-square (RMS) surface roughness proportional to the CaF 2 film thickness [29]. Therefore, CaF 2 is used to deliberately and controllably roughen the substrate surfaces.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…It is well known that deposition of CaF 2 thin films result in a roughened surface with root-mean-square (RMS) surface roughness proportional to the CaF 2 film thickness [29]. Therefore, CaF 2 is used to deliberately and controllably roughen the substrate surfaces.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…22 On glass substrates, CaF 2 films grown at room temperature showed a constant porosity of 46% by atomic force microscopy (AFM) for all thicknesses in the range 50-500 nm. 23 Based on these studies, CaF 2 films grown below ∼300 °C can be expected to exhibit small grain sizes and substantial porosity.…”
Section: Introductionmentioning
confidence: 96%