Statistical optimization and manufacturing sensitivity analysis of 0.18 μm SOI MOSFETs

Williams, Sue; Varahramyan, Kody; Maszara, W.

doi:10.1016/s0167-9317(99)00445-1

Cited by 5 publications

(3 citation statements)

References 11 publications

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“…For example, Williams et al . (1999) describe application of RSM for optimization and sensitivity analysis of manufacturing process of a type of integrated circuit.…”

Section: Sensitivity Analysis Methodsmentioning

confidence: 99%

“…Hopperstad et al (1999) applied RSM for reliability analysis of an aluminum-extrusion process. The RSM also can be used for sensitivity analysis of stochastic systems (Williams et al, 1999).…”

Section: Applicationmentioning

confidence: 99%

“…For example, Williams et al (1999) describe application of RSM for optimization and sensitivity analysis of manufacturing process of a type of integrated circuit. The complex computations required for simulation of the manufacturing process previously limited the strategies for process optimization.…”

Section: Applicationmentioning

confidence: 99%

See 2 more Smart Citations

Identification and Review of Sensitivity Analysis Methods

Frey¹,

Patil²

2002

Risk Analysis

733

114

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Identification and qualitative comparison of sensitivity analysis methods that have been used across various disciplines, and that merit consideration for application to food-safety risk assessment models, are presented in this article. Sensitivity analysis can help in identifying critical control points, prioritizing additional data collection or research, and verifying and validating a model. Ten sensitivity analysis methods, including four mathematical methods, five statistical methods, and one graphical method, are identified. The selected methods are compared on the basis of their applicability to different types of models, computational issues such as initial data requirement and complexity of their application, representation of the sensitivity, and the specific uses of these methods. Applications of these methods are illustrated with examples from various fields. No one method is clearly best for food-safety risk models. In general, use of two or more methods, preferably with dissimilar theoretical foundations, may be needed to increase confidence in the ranking of key inputs.

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“…For example, Williams et al . (1999) describe application of RSM for optimization and sensitivity analysis of manufacturing process of a type of integrated circuit.…”

Section: Sensitivity Analysis Methodsmentioning

confidence: 99%

Section: Applicationmentioning

confidence: 99%