TaN-pure-GeTe-Cu bipolar switching devices which can be adaptable to semiconductor processes were fabricated as a function of top-electrode sizes (0.2, 0.4, 10, and 50 μm). The on/off resistance change ratio increased highly with decreasing electrode size. In particular, the on/off resistance change ratio was about 10 3 when the electrode size was scaled down to 200 nm. We obtained the characteristics of conductive bridging memory cell using pure-GeTe film without any doping of Cu or Ag; we also determined the reason for the enhancement of the on/off resistance change ratio when scaling down the electrode size.Index Terms-Conductive bridging random access memory (CBRAM), Cu, dry process, e-beam lithography, GeTe, on/off ratio, scaling down, TaN. I N THE continuing development of universal memory, the search for new memory technologies that can compete with embedded dynamic random access memory and Flash memory has resulted in an emphasis on devices that offer the advantages of low-power nonvolatile operation, nondestructive read, low fabrication cost, and complementary-metal-oxidesemiconductor (CMOS) compatibility [1]. Among the various new memories, conductive bridging random access memory (CBRAM) technology combines key features of the established Flash, SRAM, and DRAM memory platforms, including small size, nonvolatility, high write endurance, and fast random access speed [2], [3]. Because the switching characteristics of CBRAM originate in the formation and annihilation of metallic bridges [4], the metal which takes part in the metallic bridges must show the reversible change between the oxidation and reduction state with applied bias voltage. The metallic material that satisfies both criteria is either Ag or Cu, and thus, a CBRAM-applicable material always contains either one of those two elements. However, these elements are of limited applicability to Si-based semiconductor processes, owing to contamination or difficulty in the dry etching process.