Design of 3-Dimensional micromachined inductors on high-(10 K · cm) and low-resistivity(10 · cm) Si substrate fabricated using stress metal technology we have developed [1, 2] is presented. Using high frequency electromagnetic simulation of 3-Dimensional inductors performed by Ansoft HFSS R , we have investigated the effects of number of turns, effective radius, metal line width, and different substrates on the quality factor, Q and self-resonant frequency, f sr of these inductors. We also have compared the simulated results with the measurement results of 3-D inductors fabricated using this technology.