Status of the PolLux STXM Beamline.

Unravelling the effect of fluorinated ligands in hybrid EUV photoresists by X-ray spectroscopy

“…NEXAFS investigations were performed ex situ at the PolLux beamline (X07DA) of the synchrotron radiation facility SLS at the PSI, using STXM with an energy resolution of E/DE 4 3000 for the 270-350 eV energy range. 44,[60][61][62] The NEXAFS measurements were performed under normal incidence in the ''line-scan'' mode in each region of interest with a length of 25 mm. On each position, the transmitted photon flux I was measured in an energy scan with varying energy step sizes for different regions of the spectrum (270-282 eV, 0.5 eV step; 282.1-293.0 eV, 0.2 eV step; 293.25-300.00 eV, 0.25 eV step; 301-350 eV, 1 eV step; dwell time 100 ms) was recorded.…”

An innovative in situ AFM system for a soft X-ray spectromicroscopy synchrotron beamline

“…14 Soft X-ray microscopy is indeed becoming a more and more widespread analytical tool for investigating complex systems at the micrometric and sub-micrometric levels, especially when combined with X-ray spectroscopy capabilities. 15 Several synchrotrons worldwide have installed STXM beamlines, [16][17][18][19][20][21][22][23][24][25] similar to each other but at the same time each with unique capabilities. STXM is a scanning technique where the sample is usually raster-scanned across a micro-or nano-probe by photons delivered by suitable X-ray optics (Fig.…”