2003
DOI: 10.1016/j.solmat.2003.06.005
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Steady-state and transient photoconductivity in hydrogenated amorphous silicon nitride films

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Cited by 14 publications
(8 citation statements)
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“…The measurements and the model match reasonably well if the trap energy depth and the effective carrier mobility in the SiN (incorporating conduction band and trap-to-trap transport) take the values E T =0.85 eV and μ=5 cm 2 /(Vs), respectively. These values agree fairly well with the literature, where E T values from 0.8 to 1.8 eV can be found [1], [15], [16] and mobilities in the range of 0.1-5 cm 2 /(sV) values are reported [1], [17]. In agreement with the experimental results of Fig.…”
Section: Sample Fabrication and Measurement Setupsupporting
confidence: 92%
“…The measurements and the model match reasonably well if the trap energy depth and the effective carrier mobility in the SiN (incorporating conduction band and trap-to-trap transport) take the values E T =0.85 eV and μ=5 cm 2 /(Vs), respectively. These values agree fairly well with the literature, where E T values from 0.8 to 1.8 eV can be found [1], [15], [16] and mobilities in the range of 0.1-5 cm 2 /(sV) values are reported [1], [17]. In agreement with the experimental results of Fig.…”
Section: Sample Fabrication and Measurement Setupsupporting
confidence: 92%
“…However, the threshold voltage dynamics during retention could be affected also by the charge distribution at the beginning of the retention experiment [7], and by the spatial redistribution of the stored charge due to the transport in the nitride. At this regard we note that, although the effective electron mobility in Si 3 N 4 reported by a few authors is low (∼0.1 cm 2 /(Vs) [8]), it is still large enough to induce significant changes on the charge spatial distribution even at low fields.…”
Section: Introductionmentioning
confidence: 68%
“…In order to avoid stability issues related to the Poisson/Drift Diffusion coupling we have however rewritten J DD in the form proposed by [10]. Note that, with expected mobilities in the order of 0.1-1 cm 2 /(Vs) [8], a field of 10-100 MV/cm is needed to reach the expected saturation velocity of 10 7 cm/s [11]. The boundary conditions for the DD equation at the Si 3 N 4 /tunnel-oxide interface are set by the direct and FowlerNordheim tunneling components of J 1 and by J 5 =qnv T ((5) in Fig.…”
Section: The Model a Physicsmentioning
confidence: 99%
“…Note that, in this case, the EQE was measured with a different system to the one used for Figure . The LIR phenomenon could be possibly ascribed to the photoconductivity of the SiN x film, which increases with light intensity; therefore, positive charges introduced by PID‐p can be easily discharged from the AlO x /SiN x stack. Ay and Tolunay demonstrated that for hydrogenated amorphous SiN x films with various nitrogen concentrations, their steady‐state photoconductivity at 300 K increases with the light intensity .…”
Section: Resultsmentioning
confidence: 99%