2011 27th Annual IEEE Semiconductor Thermal Measurement and Management Symposium 2011
DOI: 10.1109/stherm.2011.5767190
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Steady state and transient thermal analysis of hot spots in 3D stacked ICs using dedicated test chips

Abstract: 3D stacking of dies is a promising technique to allow miniaturization and performance enhancement of electronic systems. The complexity of the interconnection structures, combined with the reduced thermal spreading in the thinned dies and the poorly thermally conductive adhesives complicate the thermal behavior of a stacked die structure. The same dissipation will lead to higher temperatures and a more pronounced temperature peak in a stacked die package compared to a single die package. Therefore, the thermal… Show more

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Cited by 21 publications
(4 citation statements)
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“…Thermal simulations are used in [4] and [5] to study the thermal effect of various design and technology parameters on 3D ICs subjected to hotspot heat sources. In addition to simulations, studies in [6][7] [8] report also experimental silicon data and expose some important aspects of the heat dissipation behavior in 3D ICs. There is, however, no thorough review of the thermal impact of the TSVbased 3D integration technology.…”
Section: Introductionmentioning
confidence: 99%
“…Thermal simulations are used in [4] and [5] to study the thermal effect of various design and technology parameters on 3D ICs subjected to hotspot heat sources. In addition to simulations, studies in [6][7] [8] report also experimental silicon data and expose some important aspects of the heat dissipation behavior in 3D ICs. There is, however, no thorough review of the thermal impact of the TSVbased 3D integration technology.…”
Section: Introductionmentioning
confidence: 99%
“…While different thermal simulators allow to estimate the thermal effects in 3D-chip [1], [11], practical evaluation is more difficult as the typical IR-cam approach has limitation in measuring the different die temperatures [7]. Recently, 3D test chips have been designed to evaluate 3D-integration thermal properties by embedding controllable heaters and thermal sensors [13]. This approach allows to estimate how the heat spreads in the silicon die, but limited only to the available thermal sensors positions.…”
Section: Introduction and Related Workmentioning
confidence: 99%
“…While different thermal simulators allow to estimate the thermal effects in 3D-chip [1], [11], practical evaluation is more difficult as the typical IR-cam approach has limitation in measuring the different die temperatures [7]. Recently, 3D test chips have been designed to evaluate 3D-integration thermal properties by embedding controllable heaters and thermal sensors [13]. This approach allows to estimate how the heat spreads in the silicon die, but limited only to the available thermal sensors positions.…”
Section: Introduction and Related Workmentioning
confidence: 99%