2017
DOI: 10.1007/s00366-017-0560-8
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Steady-state, nonlinear analysis of large arrays of electrically actuated micromembranes vibrating in a fluid

Abstract: This paper describes a robust and efficient method to obtain the steady-state, nonlinear behaviour of large arrays of electrically actuated micromembranes vibrating in a fluid. The nonlinear electromechanical behavior and the multiple vibration harmonics it creates are fully taken into account thanks to a multiharmonic finite element formulation, generated automatically using symbolic calculation. A domain decomposition method allows to consider large arrays of micromembranes by efficiently distributing the co… Show more

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Cited by 5 publications
(4 citation statements)
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“…Let us remark that, similarly to [33], the spatial Jacobian ∂x ∂x of x appears in (9). In the following, we provide a frequency domain method to solve the modified wave equation (9).…”
Section: Reformulation Of the Initial Problem As A Fixed Domain Problemmentioning
confidence: 99%
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“…Let us remark that, similarly to [33], the spatial Jacobian ∂x ∂x of x appears in (9). In the following, we provide a frequency domain method to solve the modified wave equation (9).…”
Section: Reformulation Of the Initial Problem As A Fixed Domain Problemmentioning
confidence: 99%
“…In the present paper, we propose an original frequency domain method to address this problem, which leads to the solution of coupled systems of Helmholtz-type equations. First, we transform the constant coefficients wave equation in the moving domain as a new wavelike equation in a fixed domain but with variable coefficients related to the metric change (a similar approach was used for quasi-static electromagnetic models in [33]). Since we are studying the micro-Doppler problem (small amplitude and low frequency oscillations of the scatterer) for a high frequency radar, we can then expand the solution in the Fourier domain in time as a Fourier series expansion centered around the radar frequency, modulated by the low frequency perturbation induced by the scatterer movement.…”
Section: Introductionmentioning
confidence: 99%
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“…The HB method has been applied to shielding and welding problems [30], laminated cores [31], and induction heating [32]. Multiphysics simulations for microelectromechanical systems (MEMS) using the HB method have been proposed [33]. Electrical machines with linear material characteristics have been modeled in 2D [34,35].…”
Section: Harmonic Balance Methodsmentioning
confidence: 99%