Stiffness analysis of a compliant precision positioning stage

et al. 2017

Applied Sciences

Abstract:The output and input coupling characteristics of the compliant parallel mechanism (CPM) bring difficulty in the motion control and challenge its high performance and operational safety. This paper presents a systematic design method for a 2-degrees-of-freedom (DOFs) CPM with excellent decoupling performance. A symmetric kinematic structure can guarantee a CPM with a complete output decoupling characteristic; input coupling is reduced by resorting to a flexure-based decoupler. This work discusses the stiffness design requirement of the decoupler and proposes a compound flexure hinge as its basic structure. Analytical methods have been derived to assess the mechanical performances of the CPM in terms of input and output stiffness, motion stroke, input coupling degree, and natural frequency. The CPM's geometric parameters were optimized to minimize the input coupling while ensuring key performance indicators at the same time. The optimized CPM's performances were then evaluated by using a finite element analysis. Finally, a prototype was constructed and experimental validations were carried out to test the performance of the CPM and verify the effectiveness of the design method. The design procedure proposed in this paper is systematic and can be extended to design the CPMs with other types of motion.

Section: Introductionmentioning

confidence: 99%

Systematic Design Method and Experimental Validation of a 2-DOF Compliant Parallel Mechanism with Excellent Input and Output Decoupling Performances

Jiang

et al. 2017

Applied Sciences

“…In this research, closed-form equations were produced and a parametric study of the mechanism performance was also carried out. X Jia, et al [11], obtained the input stiffness model of the active arm of a 3-DOF compliant parallel positioning stage on the basis of the Castigliano's first theorem. The matrix method transforms the local compliance of the flexure members to a global frame for easily obtaining the compliance model of the entire mechanism.…”

Section: Introductionmentioning

confidence: 99%

Analytical Compliance Modeling of Serial Flexure-Based Compliant Mechanism Under Arbitrary Applied Load

Jiang

2017

Chin. J. Mech. Eng.

Analytical compliance model is vital to the flexure-based compliant mechanism in its mechanical design and motion control. The matrix is a common and effective approach in the compliance modeling while it is not well developed for the closed-loop serial and parallel compliant mechanisms and is not applicable to the situation when the external loads are applied on the flexure members. Concise and explicit analytical compliance models of the serial flexure-based compliant mechanisms under arbitrary loads are derived by using the matrix method. An equivalent method is proposed to deal with the situation when the external loads are applied on the flexure members. The external loads are transformed to concentrated forces applied on the rigid links, which satisfy the equations of static equilibrium and also guarantee that the deformations at the displacement output point remain unchanged. Then the matrix method can be still adopted for the compliance analysis of the compliant mechanism. Finally, several specific examples and an experimental test are given to verify the effectiveness of the compliance models and the force equivalent method. The research enriches the matrix method and provides concise analytical compliance models for the serial compliant mechanism.

“…1,2 Many researches have been performed to design or analyze the compliant positioning stages in recent years. [3][4][5][6][7][8][9][10][11][12] Hui Tang et al proposed a compliant two degrees of freedom (DOFs) micro-nano positioning stage. 3 Wang Hua et al carried out a deep investigation on the input coupling analysis and optimal design of the three DOFs compliant micro-positioning stage.…”

Section: Introductionmentioning

confidence: 99%

“…5 Qiliang Wang et al paid much attention to the fatigue reliability of planar compliant micropositioning stages. 6 In addition, X. Jia et al, 7 Yangmin Li et al, 8 Kee-Bong Choi et al 9 and so on [10][11][12] made great efforts on the development of compliant positioning stages. With the rapid developments of compliant mechanisms and micro-nano technologies, compliant positioning stages will be more widely applied in the future.…”

Section: Introductionmentioning

confidence: 99%

Displacement measurement of the compliant positioning stage based on a computer micro-vision method

Zhang

et al. 2016

AIP Advances

We propose a practical computer micro-vision-based method for displacement measurements of the compliant positioning stage. The algorithm of the proposed method is based on a template matching approach composed of an integer-pixel search and a sub-pixel search. By combining with an optical microscopy, a high resolution CCD camera and the proposed algorithm, an extremely high measuring precision is achieved. Various simulations and experiments are conducted. The simulation results demonstrate that the matching precision can reach to 0.01 pixel when the noise interference is low. A laser interferometer measurement system (LIMS) is established for comparison. The experimental results indicate that the proposed method possesses the same performance as the LIMS but exhibits a greater flexibility and operability. The measuring precision can theoretically attain to 2.83 nm/pixel.